JPH0260A - イオンビーム加工装置 - Google Patents

イオンビーム加工装置

Info

Publication number
JPH0260A
JPH0260A JP1117302A JP11730289A JPH0260A JP H0260 A JPH0260 A JP H0260A JP 1117302 A JP1117302 A JP 1117302A JP 11730289 A JP11730289 A JP 11730289A JP H0260 A JPH0260 A JP H0260A
Authority
JP
Japan
Prior art keywords
ion beam
sample
electrode
intensity
focused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1117302A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429052B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yamaguchi
博司 山口
Takeoki Miyauchi
宮内　建興
Akira Shimase
朗 嶋瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1117302A priority Critical patent/JPH0260A/ja
Publication of JPH0260A publication Critical patent/JPH0260A/ja
Publication of JPH0429052B2 publication Critical patent/JPH0429052B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP1117302A 1989-05-12 1989-05-12 イオンビーム加工装置 Granted JPH0260A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1117302A JPH0260A (ja) 1989-05-12 1989-05-12 イオンビーム加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1117302A JPH0260A (ja) 1989-05-12 1989-05-12 イオンビーム加工装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57078165A Division JPS58196020A (ja) 1982-05-12 1982-05-12 マスクの欠陥検査・修正方法およびその装置

Publications (2)

Publication Number Publication Date
JPH0260A true JPH0260A (ja) 1990-01-05
JPH0429052B2 JPH0429052B2 (enrdf_load_stackoverflow) 1992-05-15

Family

ID=14708391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1117302A Granted JPH0260A (ja) 1989-05-12 1989-05-12 イオンビーム加工装置

Country Status (1)

Country Link
JP (1) JPH0260A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0780731A2 (en) 1995-12-22 1997-06-25 Mitsubishi Chemical Corporation Photopolymerizable composition for a color filter, color filter and liquid crystal display device
US6521538B2 (en) 2000-02-28 2003-02-18 Denso Corporation Method of forming a trench with a rounded bottom in a semiconductor device
WO2015083804A1 (ja) 2013-12-04 2015-06-11 協同油脂株式会社 等速ジョイント用グリース組成物及びそのグリース組成物を封入した等速ジョイント

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568632A (en) * 1978-11-20 1980-05-23 Hitachi Ltd Manufacture of photomask
JPS55150225A (en) * 1979-05-11 1980-11-22 Hitachi Ltd Method of correcting white spot fault of photomask

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568632A (en) * 1978-11-20 1980-05-23 Hitachi Ltd Manufacture of photomask
JPS55150225A (en) * 1979-05-11 1980-11-22 Hitachi Ltd Method of correcting white spot fault of photomask

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0780731A2 (en) 1995-12-22 1997-06-25 Mitsubishi Chemical Corporation Photopolymerizable composition for a color filter, color filter and liquid crystal display device
US6521538B2 (en) 2000-02-28 2003-02-18 Denso Corporation Method of forming a trench with a rounded bottom in a semiconductor device
WO2015083804A1 (ja) 2013-12-04 2015-06-11 協同油脂株式会社 等速ジョイント用グリース組成物及びそのグリース組成物を封入した等速ジョイント

Also Published As

Publication number Publication date
JPH0429052B2 (enrdf_load_stackoverflow) 1992-05-15

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