JPH0259634B2 - - Google Patents
Info
- Publication number
- JPH0259634B2 JPH0259634B2 JP57185855A JP18585582A JPH0259634B2 JP H0259634 B2 JPH0259634 B2 JP H0259634B2 JP 57185855 A JP57185855 A JP 57185855A JP 18585582 A JP18585582 A JP 18585582A JP H0259634 B2 JPH0259634 B2 JP H0259634B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- nicrsi
- pattern
- strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
Landscapes
- Measurement Of Force In General (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57185855A JPS5975676A (ja) | 1982-10-22 | 1982-10-22 | 歪センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57185855A JPS5975676A (ja) | 1982-10-22 | 1982-10-22 | 歪センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5975676A JPS5975676A (ja) | 1984-04-28 |
| JPH0259634B2 true JPH0259634B2 (enrdf_load_stackoverflow) | 1990-12-13 |
Family
ID=16178053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57185855A Granted JPS5975676A (ja) | 1982-10-22 | 1982-10-22 | 歪センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5975676A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6440042U (enrdf_load_stackoverflow) * | 1987-09-07 | 1989-03-09 | ||
| JPH0680847B2 (ja) * | 1987-09-08 | 1994-10-12 | 日本電気株式会社 | 電歪効果素子 |
| JPH0887375A (ja) * | 1994-09-16 | 1996-04-02 | Fujitsu Ltd | ポインティングデバイス |
| JP2019132790A (ja) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | ひずみゲージ |
| JP7402148B2 (ja) | 2020-03-24 | 2023-12-20 | ミネベアミツミ株式会社 | ひずみゲージ |
-
1982
- 1982-10-22 JP JP57185855A patent/JPS5975676A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5975676A (ja) | 1984-04-28 |
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