JPH0251852B2 - - Google Patents

Info

Publication number
JPH0251852B2
JPH0251852B2 JP60044676A JP4467685A JPH0251852B2 JP H0251852 B2 JPH0251852 B2 JP H0251852B2 JP 60044676 A JP60044676 A JP 60044676A JP 4467685 A JP4467685 A JP 4467685A JP H0251852 B2 JPH0251852 B2 JP H0251852B2
Authority
JP
Japan
Prior art keywords
raw material
tank
material tank
supply device
auxiliary container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60044676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61205629A (ja
Inventor
Ichiro Tsucha
Hiroshi Yokota
Toshio Danzuka
Katsuji Sakamoto
Hideki Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP4467685A priority Critical patent/JPS61205629A/ja
Publication of JPS61205629A publication Critical patent/JPS61205629A/ja
Publication of JPH0251852B2 publication Critical patent/JPH0251852B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP4467685A 1985-03-08 1985-03-08 原料供給装置 Granted JPS61205629A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4467685A JPS61205629A (ja) 1985-03-08 1985-03-08 原料供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4467685A JPS61205629A (ja) 1985-03-08 1985-03-08 原料供給装置

Publications (2)

Publication Number Publication Date
JPS61205629A JPS61205629A (ja) 1986-09-11
JPH0251852B2 true JPH0251852B2 (enrdf_load_stackoverflow) 1990-11-08

Family

ID=12698043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4467685A Granted JPS61205629A (ja) 1985-03-08 1985-03-08 原料供給装置

Country Status (1)

Country Link
JP (1) JPS61205629A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7229792B2 (ja) 2018-02-05 2023-02-28 株式会社フジクラ 多孔質ガラス微粒子体の製造方法、多孔質ガラス微粒子体の製造装置、およびガラス母材の製造方法
US11393703B2 (en) * 2018-06-18 2022-07-19 Applied Materials, Inc. Apparatus and method for controlling a flow process material to a deposition chamber

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135146A (ja) * 1982-02-03 1983-08-11 Fujikura Ltd 光フアイバ母材の製造方法
JPS605029A (ja) * 1983-06-21 1985-01-11 Agency Of Ind Science & Technol 光学ガラス製造用気化原料供給方法

Also Published As

Publication number Publication date
JPS61205629A (ja) 1986-09-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees