JPH0251284B2 - - Google Patents

Info

Publication number
JPH0251284B2
JPH0251284B2 JP12975981A JP12975981A JPH0251284B2 JP H0251284 B2 JPH0251284 B2 JP H0251284B2 JP 12975981 A JP12975981 A JP 12975981A JP 12975981 A JP12975981 A JP 12975981A JP H0251284 B2 JPH0251284 B2 JP H0251284B2
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
electrode pattern
manufacturing
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12975981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5831608A (ja
Inventor
Yasuo Ehata
Shigefumi Morishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12975981A priority Critical patent/JPS5831608A/ja
Publication of JPS5831608A publication Critical patent/JPS5831608A/ja
Publication of JPH0251284B2 publication Critical patent/JPH0251284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP12975981A 1981-08-19 1981-08-19 弾性表面波素子の製造方法 Granted JPS5831608A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12975981A JPS5831608A (ja) 1981-08-19 1981-08-19 弾性表面波素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12975981A JPS5831608A (ja) 1981-08-19 1981-08-19 弾性表面波素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5831608A JPS5831608A (ja) 1983-02-24
JPH0251284B2 true JPH0251284B2 (en, 2012) 1990-11-07

Family

ID=15017488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12975981A Granted JPS5831608A (ja) 1981-08-19 1981-08-19 弾性表面波素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5831608A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756927B2 (ja) * 1988-12-16 1995-06-14 株式会社村田製作所 弾性表面波素子の製造方法
JPH03293808A (ja) * 1990-04-11 1991-12-25 Fujitsu Ltd 弾性表面波素子の製造方法
US7296329B1 (en) * 2000-02-04 2007-11-20 Agere Systems Inc. Method of isolation for acoustic resonator device

Also Published As

Publication number Publication date
JPS5831608A (ja) 1983-02-24

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