JPH0248563B2 - - Google Patents

Info

Publication number
JPH0248563B2
JPH0248563B2 JP54122640A JP12264079A JPH0248563B2 JP H0248563 B2 JPH0248563 B2 JP H0248563B2 JP 54122640 A JP54122640 A JP 54122640A JP 12264079 A JP12264079 A JP 12264079A JP H0248563 B2 JPH0248563 B2 JP H0248563B2
Authority
JP
Japan
Prior art keywords
plasma
film
monomer
reactor
polymerized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP54122640A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5647403A (en
Inventor
Kenji Yanagihara
Keikichi Yanagii
Teizo Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP12264079A priority Critical patent/JPS5647403A/ja
Publication of JPS5647403A publication Critical patent/JPS5647403A/ja
Publication of JPH0248563B2 publication Critical patent/JPH0248563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymerisation Methods In General (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
JP12264079A 1979-09-26 1979-09-26 Method of forming multilayered thin film of high polymer Granted JPS5647403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12264079A JPS5647403A (en) 1979-09-26 1979-09-26 Method of forming multilayered thin film of high polymer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12264079A JPS5647403A (en) 1979-09-26 1979-09-26 Method of forming multilayered thin film of high polymer

Publications (2)

Publication Number Publication Date
JPS5647403A JPS5647403A (en) 1981-04-30
JPH0248563B2 true JPH0248563B2 (enrdf_load_stackoverflow) 1990-10-25

Family

ID=14840965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12264079A Granted JPS5647403A (en) 1979-09-26 1979-09-26 Method of forming multilayered thin film of high polymer

Country Status (1)

Country Link
JP (1) JPS5647403A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63112738A (ja) * 1986-10-31 1988-05-17 尾池工業株式会社 超耐熱金銀糸

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4066424A (en) * 1976-10-13 1978-01-03 E. I. Du Pont De Nemours And Company Selectively recovering metal chlorides from gaseous effluent
JPS5449599A (en) * 1977-09-27 1979-04-18 Toshiba Corp High molecular piezo-electric body and method of fabricating the same

Also Published As

Publication number Publication date
JPS5647403A (en) 1981-04-30

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