JPH0343282B2 - - Google Patents

Info

Publication number
JPH0343282B2
JPH0343282B2 JP57063497A JP6349782A JPH0343282B2 JP H0343282 B2 JPH0343282 B2 JP H0343282B2 JP 57063497 A JP57063497 A JP 57063497A JP 6349782 A JP6349782 A JP 6349782A JP H0343282 B2 JPH0343282 B2 JP H0343282B2
Authority
JP
Japan
Prior art keywords
gas
film
plasma
polymerization
mixed monomer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57063497A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58180503A (ja
Inventor
Kenji Yanagihara
Mitsuo Kimura
Kozo Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP6349782A priority Critical patent/JPS58180503A/ja
Publication of JPS58180503A publication Critical patent/JPS58180503A/ja
Publication of JPH0343282B2 publication Critical patent/JPH0343282B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Polymerisation Methods In General (AREA)
JP6349782A 1982-04-16 1982-04-16 薄膜作成法 Granted JPS58180503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6349782A JPS58180503A (ja) 1982-04-16 1982-04-16 薄膜作成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6349782A JPS58180503A (ja) 1982-04-16 1982-04-16 薄膜作成法

Publications (2)

Publication Number Publication Date
JPS58180503A JPS58180503A (ja) 1983-10-22
JPH0343282B2 true JPH0343282B2 (enrdf_load_stackoverflow) 1991-07-02

Family

ID=13230934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6349782A Granted JPS58180503A (ja) 1982-04-16 1982-04-16 薄膜作成法

Country Status (1)

Country Link
JP (1) JPS58180503A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0176636B1 (en) * 1984-09-28 1990-05-09 Japan Synthetic Rubber Co., Ltd. Polymeric thin film and products containing the same
JPS61159426A (ja) * 1984-12-28 1986-07-19 Stanley Electric Co Ltd プラズマ重合体膜の形成方法
JPS61190525A (ja) * 1985-02-20 1986-08-25 Japan Synthetic Rubber Co Ltd プラズマ重合膜で被覆された金属製品
JPS61190526A (ja) * 1985-02-20 1986-08-25 Japan Synthetic Rubber Co Ltd プラズマ重合膜被覆金属製品

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660447A (en) * 1979-10-23 1981-05-25 Toshiba Corp Forming method of organic photoconductive film

Also Published As

Publication number Publication date
JPS58180503A (ja) 1983-10-22

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