JPS5647403A - Method of forming multilayered thin film of high polymer - Google Patents
Method of forming multilayered thin film of high polymerInfo
- Publication number
- JPS5647403A JPS5647403A JP12264079A JP12264079A JPS5647403A JP S5647403 A JPS5647403 A JP S5647403A JP 12264079 A JP12264079 A JP 12264079A JP 12264079 A JP12264079 A JP 12264079A JP S5647403 A JPS5647403 A JP S5647403A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- thin film
- layer
- rare gas
- monomer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polymerisation Methods In General (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
Abstract
PURPOSE: The plasma polymerizations of different kinds of monomers are effected in a plasma reactor in sequence to form polymer layers of desired film thickness on the solid surface, whereby the titled thin film is formed that is used to protect semiconductors because of its high peeling resistance due to chemical linkages with each other.
CONSTITUTION: The first plasma-polymerizable monomer such as benzene is introduced into the plasma reactor 12 equipped with the coil 4 for exciting plasma that is connected to high-frequency power source 3 from monomer bomb 10 through inlet 1 at a certain flow rate. At the same time, a rare gas such as argon is introduced from a rare gas bomb 11 through inlet 2 at a prescribed flow rate. Then, plasma is excited to form the first layer of the plasma polymerization film on the surface of the substrate. Subsequently, the second monomer such as allylamine and a rare gas are introduced to form the second layer so that the objective thin film is obtained with thickness of less than 1,000Å in each layer.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12264079A JPS5647403A (en) | 1979-09-26 | 1979-09-26 | Method of forming multilayered thin film of high polymer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12264079A JPS5647403A (en) | 1979-09-26 | 1979-09-26 | Method of forming multilayered thin film of high polymer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5647403A true JPS5647403A (en) | 1981-04-30 |
JPH0248563B2 JPH0248563B2 (en) | 1990-10-25 |
Family
ID=14840965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12264079A Granted JPS5647403A (en) | 1979-09-26 | 1979-09-26 | Method of forming multilayered thin film of high polymer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5647403A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63112738A (en) * | 1986-10-31 | 1988-05-17 | 尾池工業株式会社 | Highly heat resistant tinsel yarn |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5347398A (en) * | 1976-10-13 | 1978-04-27 | Du Pont | Selective recovery process for metallic chloride from gas effusing material |
JPS5449599A (en) * | 1977-09-27 | 1979-04-18 | Toshiba Corp | High molecular piezo-electric body and method of fabricating the same |
-
1979
- 1979-09-26 JP JP12264079A patent/JPS5647403A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5347398A (en) * | 1976-10-13 | 1978-04-27 | Du Pont | Selective recovery process for metallic chloride from gas effusing material |
JPS5449599A (en) * | 1977-09-27 | 1979-04-18 | Toshiba Corp | High molecular piezo-electric body and method of fabricating the same |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63112738A (en) * | 1986-10-31 | 1988-05-17 | 尾池工業株式会社 | Highly heat resistant tinsel yarn |
Also Published As
Publication number | Publication date |
---|---|
JPH0248563B2 (en) | 1990-10-25 |
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