JPH0248108B2 - - Google Patents
Info
- Publication number
- JPH0248108B2 JPH0248108B2 JP59258879A JP25887984A JPH0248108B2 JP H0248108 B2 JPH0248108 B2 JP H0248108B2 JP 59258879 A JP59258879 A JP 59258879A JP 25887984 A JP25887984 A JP 25887984A JP H0248108 B2 JPH0248108 B2 JP H0248108B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- base material
- sheet
- disks
- hard base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 12
- 239000011521 glass Substances 0.000 description 17
- 238000002508 contact lithography Methods 0.000 description 8
- 238000010409 ironing Methods 0.000 description 5
- 239000002390 adhesive tape Substances 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59258879A JPS61137153A (ja) | 1984-12-07 | 1984-12-07 | 基材へのシ−トの密着方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59258879A JPS61137153A (ja) | 1984-12-07 | 1984-12-07 | 基材へのシ−トの密着方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61137153A JPS61137153A (ja) | 1986-06-24 |
JPH0248108B2 true JPH0248108B2 (nl) | 1990-10-24 |
Family
ID=17326296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59258879A Granted JPS61137153A (ja) | 1984-12-07 | 1984-12-07 | 基材へのシ−トの密着方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61137153A (nl) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6327845A (ja) * | 1986-07-22 | 1988-02-05 | Kitamura:Kk | 真空密着焼付機 |
JPH0850335A (ja) * | 1995-07-07 | 1996-02-20 | Dainippon Screen Mfg Co Ltd | 焼枠装置の密着方法 |
-
1984
- 1984-12-07 JP JP59258879A patent/JPS61137153A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61137153A (ja) | 1986-06-24 |
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