JPH024642B2 - - Google Patents

Info

Publication number
JPH024642B2
JPH024642B2 JP57017577A JP1757782A JPH024642B2 JP H024642 B2 JPH024642 B2 JP H024642B2 JP 57017577 A JP57017577 A JP 57017577A JP 1757782 A JP1757782 A JP 1757782A JP H024642 B2 JPH024642 B2 JP H024642B2
Authority
JP
Japan
Prior art keywords
fine particles
plasma
container
coated
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57017577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58136701A (ja
Inventor
Kenji Yanagihara
Mitsuo Kimura
Kozo Arai
Teizo Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP57017577A priority Critical patent/JPS58136701A/ja
Publication of JPS58136701A publication Critical patent/JPS58136701A/ja
Publication of JPH024642B2 publication Critical patent/JPH024642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
JP57017577A 1982-02-08 1982-02-08 微粒子のコーティング方法 Granted JPS58136701A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57017577A JPS58136701A (ja) 1982-02-08 1982-02-08 微粒子のコーティング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57017577A JPS58136701A (ja) 1982-02-08 1982-02-08 微粒子のコーティング方法

Publications (2)

Publication Number Publication Date
JPS58136701A JPS58136701A (ja) 1983-08-13
JPH024642B2 true JPH024642B2 (enrdf_load_stackoverflow) 1990-01-30

Family

ID=11947760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57017577A Granted JPS58136701A (ja) 1982-02-08 1982-02-08 微粒子のコーティング方法

Country Status (1)

Country Link
JP (1) JPS58136701A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2590937B2 (ja) * 1987-09-30 1997-03-19 石川島播磨重工業株式会社 比表面積の大きい原料へのｃｖｄによるカーボン薄膜製造方法
JP2002060943A (ja) * 2000-08-22 2002-02-28 Tohoku Electric Power Co Inc 高純度シリコンの被覆方法及び装置
JP5044756B2 (ja) * 2007-01-10 2012-10-10 株式会社ツバキエマソン Ｄｌｃ成膜装置
JP5277442B2 (ja) * 2009-08-03 2013-08-28 株式会社ユーテック 微粒子
SG10201606973YA (en) * 2015-08-31 2017-03-30 Ultratech Inc Plasma-enhanced atomic layer deposition system with rotary reactor tube
EP4273296B1 (en) * 2016-07-15 2025-03-26 OneD Material, Inc. Manufacturing apparatus and method for making silicon nanowires on carbon based powders for use in batteries
JP7191652B2 (ja) * 2018-11-16 2022-12-19 日本化学工業株式会社 被覆粒子の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236508B2 (enrdf_load_stackoverflow) * 1972-05-31 1977-09-16
JPS5628792B2 (enrdf_load_stackoverflow) * 1972-09-04 1981-07-03
JPS5236759A (en) * 1975-09-18 1977-03-22 Oki Electric Ind Co Ltd Method of fixing parts on printed circuit board
JPS5641375A (en) * 1979-09-13 1981-04-18 Matsushita Electric Ind Co Ltd Sputtering apparatus
JPS5645962A (en) * 1979-09-25 1981-04-25 Nippon Tokushu Toryo Kk Asphaltic coating-type vibration-damping material
JPS57166373A (en) * 1981-04-02 1982-10-13 Sumitomo Electric Industries Manufacture of non-oxide ceramics
JPS5822302A (ja) * 1981-07-30 1983-02-09 Nippon Steel Corp 水素吸蔵金属の活性化処理方法
JPS5881971A (ja) * 1981-11-11 1983-05-17 Matsushita Electric Ind Co Ltd 着膜装置
JPS58100601A (ja) * 1981-12-09 1983-06-15 Japan Synthetic Rubber Co Ltd 被覆超微粒子またはその膜並びに形成方法及び装置

Also Published As

Publication number Publication date
JPS58136701A (ja) 1983-08-13

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