JPH0244145B2 - - Google Patents

Info

Publication number
JPH0244145B2
JPH0244145B2 JP58251594A JP25159483A JPH0244145B2 JP H0244145 B2 JPH0244145 B2 JP H0244145B2 JP 58251594 A JP58251594 A JP 58251594A JP 25159483 A JP25159483 A JP 25159483A JP H0244145 B2 JPH0244145 B2 JP H0244145B2
Authority
JP
Japan
Prior art keywords
film
bump
conductive film
film layer
bumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58251594A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60140737A (ja
Inventor
Toshiaki Kumada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP58251594A priority Critical patent/JPS60140737A/ja
Publication of JPS60140737A publication Critical patent/JPS60140737A/ja
Publication of JPH0244145B2 publication Critical patent/JPH0244145B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
JP58251594A 1983-12-27 1983-12-27 半導体装置の製造方法 Granted JPS60140737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58251594A JPS60140737A (ja) 1983-12-27 1983-12-27 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58251594A JPS60140737A (ja) 1983-12-27 1983-12-27 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60140737A JPS60140737A (ja) 1985-07-25
JPH0244145B2 true JPH0244145B2 (en, 2012) 1990-10-02

Family

ID=17225136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58251594A Granted JPS60140737A (ja) 1983-12-27 1983-12-27 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60140737A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2633586B2 (ja) * 1987-10-21 1997-07-23 株式会社東芝 バンプ構造を有する半導体装置
JPH04359518A (ja) * 1991-06-06 1992-12-11 Nec Corp 半導体装置の製造方法
US5492235A (en) * 1995-12-18 1996-02-20 Intel Corporation Process for single mask C4 solder bump fabrication

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131766A (en) * 1977-04-22 1978-11-16 Hitachi Ltd Semiconductor device electrode structural body and production of the same
JPS57198647A (en) * 1981-06-01 1982-12-06 Nec Corp Semiconductor device and manufacture therefor

Also Published As

Publication number Publication date
JPS60140737A (ja) 1985-07-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term