JPH0244096A - ダイヤモンドの気相合成方法 - Google Patents

ダイヤモンドの気相合成方法

Info

Publication number
JPH0244096A
JPH0244096A JP63305674A JP30567488A JPH0244096A JP H0244096 A JPH0244096 A JP H0244096A JP 63305674 A JP63305674 A JP 63305674A JP 30567488 A JP30567488 A JP 30567488A JP H0244096 A JPH0244096 A JP H0244096A
Authority
JP
Japan
Prior art keywords
gas
diamond
vacuum chamber
substrate
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63305674A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476348B2 (oth
Inventor
Kazutaka Kanda
一隆 神田
Kiyomi Takehata
竹端　精己
Shoichi Yoshida
吉田　昇一
Kenichiro Yamagishi
山岸　憲一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nachi Fujikoshi Corp
Original Assignee
Nachi Fujikoshi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nachi Fujikoshi Corp filed Critical Nachi Fujikoshi Corp
Priority to JP63305674A priority Critical patent/JPH0244096A/ja
Publication of JPH0244096A publication Critical patent/JPH0244096A/ja
Publication of JPH0476348B2 publication Critical patent/JPH0476348B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP63305674A 1988-05-02 1988-12-02 ダイヤモンドの気相合成方法 Granted JPH0244096A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63305674A JPH0244096A (ja) 1988-05-02 1988-12-02 ダイヤモンドの気相合成方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63-107651 1988-05-02
JP10765188 1988-05-02
JP63305674A JPH0244096A (ja) 1988-05-02 1988-12-02 ダイヤモンドの気相合成方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP7303350A Division JPH08225394A (ja) 1995-10-30 1995-10-30 ダイヤモンドの気相合成方法

Publications (2)

Publication Number Publication Date
JPH0244096A true JPH0244096A (ja) 1990-02-14
JPH0476348B2 JPH0476348B2 (oth) 1992-12-03

Family

ID=26447679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63305674A Granted JPH0244096A (ja) 1988-05-02 1988-12-02 ダイヤモンドの気相合成方法

Country Status (1)

Country Link
JP (1) JPH0244096A (oth)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891100A (ja) * 1981-11-25 1983-05-30 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法
JPS61183198A (ja) * 1984-12-29 1986-08-15 Kyocera Corp ダイヤモンド膜の製法
JPS62158195A (ja) * 1985-12-27 1987-07-14 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法
JPS63117995A (ja) * 1986-11-05 1988-05-21 Kobe Steel Ltd ダイヤモンドの気相合成法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891100A (ja) * 1981-11-25 1983-05-30 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法
JPS61183198A (ja) * 1984-12-29 1986-08-15 Kyocera Corp ダイヤモンド膜の製法
JPS62158195A (ja) * 1985-12-27 1987-07-14 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法
JPS63117995A (ja) * 1986-11-05 1988-05-21 Kobe Steel Ltd ダイヤモンドの気相合成法

Also Published As

Publication number Publication date
JPH0476348B2 (oth) 1992-12-03

Similar Documents

Publication Publication Date Title
Tachibana et al. Diamond films grown by a 60-kW microwave plasma chemical vapor deposition system
Maeda et al. Diamond growth from a mixture of fluorocarbon and hydrogen in a microwave plasma
JPH059735A (ja) ダイヤモンドの気相合成方法
JPS61163195A (ja) ダイヤモンド気相合成法及びその装置
JPH0244096A (ja) ダイヤモンドの気相合成方法
JPS62158195A (ja) ダイヤモンドの合成法
Nakamura et al. High quality chemical vapor deposition diamond growth on iron and stainless steel substrates
KR100249825B1 (ko) 유기금속 화합물 전구체에 의한 구리박막의 화학증착 방법
US7622151B2 (en) Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions
JPH03174397A (ja) 硬質物質の合成方法およびその合成装置
JPS63117993A (ja) ダイヤモンドの気相合成法
JPH08225394A (ja) ダイヤモンドの気相合成方法
JPS63128179A (ja) 硬質窒化硼素の合成方法および合成装置
JPH0226894A (ja) ダイヤモンドの気相合成方法および装置
JP3190100B2 (ja) 炭素材料作製装置
JPH064915B2 (ja) 立方晶窒化ホウ素の合成方法
Zhu et al. EFFECTS OF PROCESS PARAMETERS ON
Kelly et al. Diamond Growth from Sputtered Atomic Carbon and Hydrogen Gas
Koshevoy et al. Growth Kinetics of CVD Diamond Films Deposited in Glow Discharge Plasma Using a Pulsed Power Supply
JPH0532489A (ja) プラズマを用いるダイヤモンドの合成法
JPH07118093A (ja) ダイヤモンド結晶の形成方法
Olson et al. Sequential Growth of High Quality Diamond Films from Hydrocarbon and Hydrogen Gases
JPH10167889A (ja) ダイヤモンドの合成方法
Choe Synthesis of diamond thin films by hot-filament CVD
JPS63236791A (ja) ダイヤモンドの製造方法