JPH0476348B2 - - Google Patents
Info
- Publication number
- JPH0476348B2 JPH0476348B2 JP63305674A JP30567488A JPH0476348B2 JP H0476348 B2 JPH0476348 B2 JP H0476348B2 JP 63305674 A JP63305674 A JP 63305674A JP 30567488 A JP30567488 A JP 30567488A JP H0476348 B2 JPH0476348 B2 JP H0476348B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- diamond
- vacuum chamber
- substrate
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63305674A JPH0244096A (ja) | 1988-05-02 | 1988-12-02 | ダイヤモンドの気相合成方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63-107651 | 1988-05-02 | ||
| JP10765188 | 1988-05-02 | ||
| JP63305674A JPH0244096A (ja) | 1988-05-02 | 1988-12-02 | ダイヤモンドの気相合成方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7303350A Division JPH08225394A (ja) | 1995-10-30 | 1995-10-30 | ダイヤモンドの気相合成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0244096A JPH0244096A (ja) | 1990-02-14 |
| JPH0476348B2 true JPH0476348B2 (oth) | 1992-12-03 |
Family
ID=26447679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63305674A Granted JPH0244096A (ja) | 1988-05-02 | 1988-12-02 | ダイヤモンドの気相合成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244096A (oth) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927753B2 (ja) * | 1981-11-25 | 1984-07-07 | 科学技術庁無機材質研究所長 | ダイヤモンドの合成法 |
| JPS61183198A (ja) * | 1984-12-29 | 1986-08-15 | Kyocera Corp | ダイヤモンド膜の製法 |
| JPS62158195A (ja) * | 1985-12-27 | 1987-07-14 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
| JPS63117995A (ja) * | 1986-11-05 | 1988-05-21 | Kobe Steel Ltd | ダイヤモンドの気相合成法 |
-
1988
- 1988-12-02 JP JP63305674A patent/JPH0244096A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0244096A (ja) | 1990-02-14 |
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