JPH0242837B2 - - Google Patents

Info

Publication number
JPH0242837B2
JPH0242837B2 JP24642484A JP24642484A JPH0242837B2 JP H0242837 B2 JPH0242837 B2 JP H0242837B2 JP 24642484 A JP24642484 A JP 24642484A JP 24642484 A JP24642484 A JP 24642484A JP H0242837 B2 JPH0242837 B2 JP H0242837B2
Authority
JP
Japan
Prior art keywords
reaction
phosphoric
phosphoric acid
phosphoric anhydride
monoester
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP24642484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61126090A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP24642484A priority Critical patent/JPS61126090A/ja
Publication of JPS61126090A publication Critical patent/JPS61126090A/ja
Publication of JPH0242837B2 publication Critical patent/JPH0242837B2/ja
Granted legal-status Critical Current

Links

JP24642484A 1984-11-21 1984-11-21 リン酸モノエステルの製造方法 Granted JPS61126090A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24642484A JPS61126090A (ja) 1984-11-21 1984-11-21 リン酸モノエステルの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24642484A JPS61126090A (ja) 1984-11-21 1984-11-21 リン酸モノエステルの製造方法

Publications (2)

Publication Number Publication Date
JPS61126090A JPS61126090A (ja) 1986-06-13
JPH0242837B2 true JPH0242837B2 (enrdf_load_stackoverflow) 1990-09-26

Family

ID=17148270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24642484A Granted JPS61126090A (ja) 1984-11-21 1984-11-21 リン酸モノエステルの製造方法

Country Status (1)

Country Link
JP (1) JPS61126090A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6580397B2 (ja) * 2014-07-17 2019-09-25 ソウルブレイン シーオー．， エルティーディー． エッチング用組成物及びこれを用いた半導体素子の製造方法

Also Published As

Publication number Publication date
JPS61126090A (ja) 1986-06-13

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