JPH024138B2 - - Google Patents

Info

Publication number
JPH024138B2
JPH024138B2 JP56210513A JP21051381A JPH024138B2 JP H024138 B2 JPH024138 B2 JP H024138B2 JP 56210513 A JP56210513 A JP 56210513A JP 21051381 A JP21051381 A JP 21051381A JP H024138 B2 JPH024138 B2 JP H024138B2
Authority
JP
Japan
Prior art keywords
film
aluminum nitride
nitride film
mask
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56210513A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58112372A (ja
Inventor
Naoki Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56210513A priority Critical patent/JPS58112372A/ja
Publication of JPS58112372A publication Critical patent/JPS58112372A/ja
Publication of JPH024138B2 publication Critical patent/JPH024138B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP56210513A 1981-12-26 1981-12-26 半導体装置の製造方法 Granted JPS58112372A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56210513A JPS58112372A (ja) 1981-12-26 1981-12-26 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56210513A JPS58112372A (ja) 1981-12-26 1981-12-26 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58112372A JPS58112372A (ja) 1983-07-04
JPH024138B2 true JPH024138B2 (en:Method) 1990-01-26

Family

ID=16590611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56210513A Granted JPS58112372A (ja) 1981-12-26 1981-12-26 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58112372A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5849620A (en) * 1995-10-18 1998-12-15 Abb Research Ltd. Method for producing a semiconductor device comprising an implantation step

Also Published As

Publication number Publication date
JPS58112372A (ja) 1983-07-04

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