JPH0240747B2 - - Google Patents

Info

Publication number
JPH0240747B2
JPH0240747B2 JP61139314A JP13931486A JPH0240747B2 JP H0240747 B2 JPH0240747 B2 JP H0240747B2 JP 61139314 A JP61139314 A JP 61139314A JP 13931486 A JP13931486 A JP 13931486A JP H0240747 B2 JPH0240747 B2 JP H0240747B2
Authority
JP
Japan
Prior art keywords
plating
plating liquid
wafer
liquid
injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61139314A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62297494A (ja
Inventor
Junichi Tezuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP13931486A priority Critical patent/JPS62297494A/ja
Publication of JPS62297494A publication Critical patent/JPS62297494A/ja
Publication of JPH0240747B2 publication Critical patent/JPH0240747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
JP13931486A 1986-06-17 1986-06-17 半導体ウェハー用メッキ装置 Granted JPS62297494A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13931486A JPS62297494A (ja) 1986-06-17 1986-06-17 半導体ウェハー用メッキ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13931486A JPS62297494A (ja) 1986-06-17 1986-06-17 半導体ウェハー用メッキ装置

Publications (2)

Publication Number Publication Date
JPS62297494A JPS62297494A (ja) 1987-12-24
JPH0240747B2 true JPH0240747B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-13

Family

ID=15242418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13931486A Granted JPS62297494A (ja) 1986-06-17 1986-06-17 半導体ウェハー用メッキ装置

Country Status (1)

Country Link
JP (1) JPS62297494A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0640615A (ja) * 1992-07-23 1994-02-15 Kobayashi Seisakusho:Kk ウエブスプライス装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07113159B2 (ja) * 1988-08-29 1995-12-06 日本電装株式会社 めっき装置
JPH083153B2 (ja) * 1990-02-26 1996-01-17 日本電装株式会社 めっき装置
JP3438387B2 (ja) * 1995-03-16 2003-08-18 株式会社デンソー めっき装置およびめっき方法
KR100637890B1 (ko) 1999-07-08 2006-10-23 가부시키가이샤 에바라 세이사꾸쇼 도금장치 및 도금방법 및 도금처리설비
US6547937B1 (en) * 2000-01-03 2003-04-15 Semitool, Inc. Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
US7153400B2 (en) * 2002-09-30 2006-12-26 Lam Research Corporation Apparatus and method for depositing and planarizing thin films of semiconductor wafers
US7393439B2 (en) 2003-06-06 2008-07-01 Semitool, Inc. Integrated microfeature workpiece processing tools with registration systems for paddle reactors
US20050034977A1 (en) 2003-06-06 2005-02-17 Hanson Kyle M. Electrochemical deposition chambers for depositing materials onto microfeature workpieces
US7390383B2 (en) 2003-07-01 2008-06-24 Semitool, Inc. Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces
CN110318086A (zh) * 2018-03-28 2019-10-11 姜力 电镀槽结构

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5137080Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-05-31 1976-09-10
US4418151A (en) * 1981-03-30 1983-11-29 Rohm And Haas Company Assay process with non-boiling denaturation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0640615A (ja) * 1992-07-23 1994-02-15 Kobayashi Seisakusho:Kk ウエブスプライス装置

Also Published As

Publication number Publication date
JPS62297494A (ja) 1987-12-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees