JPH0238942Y2 - - Google Patents
Info
- Publication number
- JPH0238942Y2 JPH0238942Y2 JP19775284U JP19775284U JPH0238942Y2 JP H0238942 Y2 JPH0238942 Y2 JP H0238942Y2 JP 19775284 U JP19775284 U JP 19775284U JP 19775284 U JP19775284 U JP 19775284U JP H0238942 Y2 JPH0238942 Y2 JP H0238942Y2
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- gear
- bell
- quartz
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 13
- 230000003028 elevating effect Effects 0.000 claims description 8
- 239000002184 metal Substances 0.000 description 30
- 239000010453 quartz Substances 0.000 description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 30
- 238000004140 cleaning Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19775284U JPH0238942Y2 (is) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19775284U JPH0238942Y2 (is) | 1984-12-27 | 1984-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61111971U JPS61111971U (is) | 1986-07-15 |
| JPH0238942Y2 true JPH0238942Y2 (is) | 1990-10-19 |
Family
ID=30756216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19775284U Expired JPH0238942Y2 (is) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238942Y2 (is) |
-
1984
- 1984-12-27 JP JP19775284U patent/JPH0238942Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61111971U (is) | 1986-07-15 |
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