JPS61111971U - - Google Patents
Info
- Publication number
- JPS61111971U JPS61111971U JP19775284U JP19775284U JPS61111971U JP S61111971 U JPS61111971 U JP S61111971U JP 19775284 U JP19775284 U JP 19775284U JP 19775284 U JP19775284 U JP 19775284U JP S61111971 U JPS61111971 U JP S61111971U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- vapor phase
- phase growth
- growth apparatus
- vertical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19775284U JPH0238942Y2 (is) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19775284U JPH0238942Y2 (is) | 1984-12-27 | 1984-12-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61111971U true JPS61111971U (is) | 1986-07-15 |
JPH0238942Y2 JPH0238942Y2 (is) | 1990-10-19 |
Family
ID=30756216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19775284U Expired JPH0238942Y2 (is) | 1984-12-27 | 1984-12-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0238942Y2 (is) |
-
1984
- 1984-12-27 JP JP19775284U patent/JPH0238942Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0238942Y2 (is) | 1990-10-19 |