JPS61111971U - - Google Patents
Info
- Publication number
- JPS61111971U JPS61111971U JP19775284U JP19775284U JPS61111971U JP S61111971 U JPS61111971 U JP S61111971U JP 19775284 U JP19775284 U JP 19775284U JP 19775284 U JP19775284 U JP 19775284U JP S61111971 U JPS61111971 U JP S61111971U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- vapor phase
- phase growth
- growth apparatus
- vertical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図および第２図は本考案の一実施例を示し
第１図は一部を断面した側面図、第２図は一部を
断面した正面図、第３図および第４図は従来例を
示し第３図は側面図、第４図は平面図である。
１２…石英ベルジヤ、１３…ベースプレート、
１４…反応室、１６…ウエハ、１７…サセプタ、
２１，２２…石英ベルジヤ支え、３２…金属ベル
ジヤ、３３…孔、３８…昇降軸、４９…ローラ、
５３…レール。
Figures 1 and 2 show one embodiment of the present invention, Figure 1 is a partially sectional side view, Figure 2 is a partially sectional front view, and Figures 3 and 4 are conventional examples. 3 is a side view, and FIG. 4 is a plan view. 12...Quartz bell gear, 13...Base plate,
14...Reaction chamber, 16...Wafer, 17...Susceptor,
21, 22... Quartz bell gear support, 32... Metal bell gear, 33... Hole, 38... Lifting shaft, 49... Roller,
53...Rail.
Claims (1)
する縦型気相成長装置において、前記ベルジヤに
対し係脱可能になされ同ベルジヤを昇降させる昇
降手段と、上昇位置にあるベルジヤに対して係脱
可能になされ同ベルジヤを前後方向へ移動させる
移動手段とからなる縦型気相成長装置のベルジヤ
昇降移動装置。 In a vertical vapor phase growth apparatus in which a reaction chamber is formed by a bell gear and a base plate, a lifting means is provided that is detachable from the bell gear and raises and lowers the bell gear; A bell gear elevating and lowering device for a vertical vapor phase growth apparatus, comprising a moving means for moving the vertical vapor phase growth apparatus in the front and rear directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19775284U JPH0238942Y2 (en) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19775284U JPH0238942Y2 (en) | 1984-12-27 | 1984-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61111971U true JPS61111971U (en) | 1986-07-15 |
| JPH0238942Y2 JPH0238942Y2 (en) | 1990-10-19 |
Family
ID=30756216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19775284U Expired JPH0238942Y2 (en) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238942Y2 (en) |
-
1984
- 1984-12-27 JP JP19775284U patent/JPH0238942Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238942Y2 (en) | 1990-10-19 |