JPH0237692B2 - - Google Patents
Info
- Publication number
- JPH0237692B2 JPH0237692B2 JP59171538A JP17153884A JPH0237692B2 JP H0237692 B2 JPH0237692 B2 JP H0237692B2 JP 59171538 A JP59171538 A JP 59171538A JP 17153884 A JP17153884 A JP 17153884A JP H0237692 B2 JPH0237692 B2 JP H0237692B2
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- source element
- beam source
- radiation
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17153884A JPS6150326A (ja) | 1984-08-20 | 1984-08-20 | 半導体結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17153884A JPS6150326A (ja) | 1984-08-20 | 1984-08-20 | 半導体結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6150326A JPS6150326A (ja) | 1986-03-12 |
| JPH0237692B2 true JPH0237692B2 (enrdf_load_stackoverflow) | 1990-08-27 |
Family
ID=15924978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17153884A Granted JPS6150326A (ja) | 1984-08-20 | 1984-08-20 | 半導体結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150326A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6057611A (ja) * | 1983-08-09 | 1985-04-03 | Fujitsu Ltd | 分子線源シヤツタ |
| JPH078755B2 (ja) * | 1987-05-28 | 1995-02-01 | 日本電子株式会社 | 分子線エピタキシ−装置 |
| TW200805015A (en) | 2006-07-12 | 2008-01-16 | Micro Star Int Co Ltd | Method of volume controlling |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122766U (enrdf_load_stackoverflow) * | 1978-02-15 | 1979-08-28 | ||
| JPS54162454A (en) * | 1978-06-14 | 1979-12-24 | Fujitsu Ltd | Molecular beam generating unit |
| JPS57156031A (en) * | 1981-03-20 | 1982-09-27 | Matsushita Electric Ind Co Ltd | Formation of thin film and vacuum deposition device |
-
1984
- 1984-08-20 JP JP17153884A patent/JPS6150326A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6150326A (ja) | 1986-03-12 |
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