JPH0237232B2 - - Google Patents

Info

Publication number
JPH0237232B2
JPH0237232B2 JP58120760A JP12076083A JPH0237232B2 JP H0237232 B2 JPH0237232 B2 JP H0237232B2 JP 58120760 A JP58120760 A JP 58120760A JP 12076083 A JP12076083 A JP 12076083A JP H0237232 B2 JPH0237232 B2 JP H0237232B2
Authority
JP
Japan
Prior art keywords
cleaning
solvent
cleaning solvent
cleaned
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58120760A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6012187A (ja
Inventor
Atsusuke Sakaida
Masanori Suzuki
Tadahiko Shibata
Hachiro Shigeta
Satoshi Kugai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP12076083A priority Critical patent/JPS6012187A/ja
Publication of JPS6012187A publication Critical patent/JPS6012187A/ja
Publication of JPH0237232B2 publication Critical patent/JPH0237232B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP12076083A 1983-07-02 1983-07-02 洗浄方法及び装置 Granted JPS6012187A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12076083A JPS6012187A (ja) 1983-07-02 1983-07-02 洗浄方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12076083A JPS6012187A (ja) 1983-07-02 1983-07-02 洗浄方法及び装置

Publications (2)

Publication Number Publication Date
JPS6012187A JPS6012187A (ja) 1985-01-22
JPH0237232B2 true JPH0237232B2 (cs) 1990-08-23

Family

ID=14794311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12076083A Granted JPS6012187A (ja) 1983-07-02 1983-07-02 洗浄方法及び装置

Country Status (1)

Country Link
JP (1) JPS6012187A (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0744167B2 (ja) * 1990-03-14 1995-05-15 株式会社ダン・クリーン・プロダクト スプレー洗浄装置
JP2596483B2 (ja) * 1991-08-23 1997-04-02 坂東機工株式会社 ガラス板の加工機械
US5807166A (en) * 1994-07-21 1998-09-15 Bando Kiko Co., Ltd. Glass-plate working machine
JP5423555B2 (ja) * 2010-04-16 2014-02-19 株式会社デンソー 洗浄乾燥方法および洗浄乾燥装置
US9406501B2 (en) * 2012-05-31 2016-08-02 Semes Co., Ltd. Apparatus and method for cleaning substrate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5218594U (cs) * 1975-07-28 1977-02-09
SE413477B (sv) * 1978-09-06 1980-06-02 Ekstrom & Co H A B Expanderbar dorn for anvendning vid uppbyggnad av ror
JPS5826616Y2 (ja) * 1981-07-07 1983-06-08 千年 内田 ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ−

Also Published As

Publication number Publication date
JPS6012187A (ja) 1985-01-22

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