JPH0235576A - 配線パターン欠陥検出方法及び装置 - Google Patents

配線パターン欠陥検出方法及び装置

Info

Publication number
JPH0235576A
JPH0235576A JP1127793A JP12779389A JPH0235576A JP H0235576 A JPH0235576 A JP H0235576A JP 1127793 A JP1127793 A JP 1127793A JP 12779389 A JP12779389 A JP 12779389A JP H0235576 A JPH0235576 A JP H0235576A
Authority
JP
Japan
Prior art keywords
pattern
data
connection data
pattern defect
defect detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1127793A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577112B2 (cs
Inventor
Takanori Ninomiya
隆典 二宮
Yasuo Nakagawa
中川　泰夫
Hiroya Saitou
斎藤　啓谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1127793A priority Critical patent/JPH0235576A/ja
Publication of JPH0235576A publication Critical patent/JPH0235576A/ja
Publication of JPH0577112B2 publication Critical patent/JPH0577112B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1127793A 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置 Granted JPH0235576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1127793A JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1127793A JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58065659A Division JPS59192945A (ja) 1983-04-15 1983-04-15 配線パターン欠陥検出方法及びその装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2093036A Division JPH02297198A (ja) 1990-04-10 1990-04-10 配線パターン欠陥検出方法及び装置

Publications (2)

Publication Number Publication Date
JPH0235576A true JPH0235576A (ja) 1990-02-06
JPH0577112B2 JPH0577112B2 (cs) 1993-10-26

Family

ID=14968818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1127793A Granted JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Country Status (1)

Country Link
JP (1) JPH0235576A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009005095A (ja) * 2007-06-21 2009-01-08 Mitsubishi Electric Corp 監視カメラシステム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114130A (en) * 1978-02-27 1979-09-06 Nec Home Electronics Ltd Mark quality deciding method
JPS57106125A (en) * 1980-12-24 1982-07-01 Fujitsu Ltd Inspecting method and device for pattern
JPS58179343A (ja) * 1982-04-14 1983-10-20 Nec Corp 図形検査方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114130A (en) * 1978-02-27 1979-09-06 Nec Home Electronics Ltd Mark quality deciding method
JPS57106125A (en) * 1980-12-24 1982-07-01 Fujitsu Ltd Inspecting method and device for pattern
JPS58179343A (ja) * 1982-04-14 1983-10-20 Nec Corp 図形検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009005095A (ja) * 2007-06-21 2009-01-08 Mitsubishi Electric Corp 監視カメラシステム

Also Published As

Publication number Publication date
JPH0577112B2 (cs) 1993-10-26

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