JPH0234141B2 - - Google Patents

Info

Publication number
JPH0234141B2
JPH0234141B2 JP56017789A JP1778981A JPH0234141B2 JP H0234141 B2 JPH0234141 B2 JP H0234141B2 JP 56017789 A JP56017789 A JP 56017789A JP 1778981 A JP1778981 A JP 1778981A JP H0234141 B2 JPH0234141 B2 JP H0234141B2
Authority
JP
Japan
Prior art keywords
lens
projection lens
excitation
distortion aberration
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56017789A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57132655A (en
Inventor
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56017789A priority Critical patent/JPS57132655A/ja
Publication of JPS57132655A publication Critical patent/JPS57132655A/ja
Publication of JPH0234141B2 publication Critical patent/JPH0234141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56017789A 1981-02-09 1981-02-09 Image focussing lens system of electron microscope Granted JPS57132655A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56017789A JPS57132655A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56017789A JPS57132655A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Publications (2)

Publication Number Publication Date
JPS57132655A JPS57132655A (en) 1982-08-17
JPH0234141B2 true JPH0234141B2 (enExample) 1990-08-01

Family

ID=11953476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56017789A Granted JPS57132655A (en) 1981-02-09 1981-02-09 Image focussing lens system of electron microscope

Country Status (1)

Country Link
JP (1) JPS57132655A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55159554A (en) * 1979-05-31 1980-12-11 Jeol Ltd Electron lens

Also Published As

Publication number Publication date
JPS57132655A (en) 1982-08-17

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