JPH0231635B2 - - Google Patents

Info

Publication number
JPH0231635B2
JPH0231635B2 JP59021817A JP2181784A JPH0231635B2 JP H0231635 B2 JPH0231635 B2 JP H0231635B2 JP 59021817 A JP59021817 A JP 59021817A JP 2181784 A JP2181784 A JP 2181784A JP H0231635 B2 JPH0231635 B2 JP H0231635B2
Authority
JP
Japan
Prior art keywords
laser
light
beam splitter
output
detects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59021817A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60166185A (ja
Inventor
Yoshihide Kanehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59021817A priority Critical patent/JPS60166185A/ja
Publication of JPS60166185A publication Critical patent/JPS60166185A/ja
Publication of JPH0231635B2 publication Critical patent/JPH0231635B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP59021817A 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置 Granted JPS60166185A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59021817A JPS60166185A (ja) 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59021817A JPS60166185A (ja) 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置

Publications (2)

Publication Number Publication Date
JPS60166185A JPS60166185A (ja) 1985-08-29
JPH0231635B2 true JPH0231635B2 (enrdf_load_stackoverflow) 1990-07-16

Family

ID=12065608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59021817A Granted JPS60166185A (ja) 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置

Country Status (1)

Country Link
JP (1) JPS60166185A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10328867A (ja) * 1997-06-05 1998-12-15 Mitsubishi Electric Corp レーザビーム加工装置およびレーザビーム加工装置用の焦点位置決め治具およびレーザビーム集光直径測定治具
KR101010492B1 (ko) * 2002-04-18 2011-01-21 어플라이드 머티어리얼스, 인코포레이티드 전자기 방사선의 스캐닝에 의한 열 플럭스 프로세싱
KR100670940B1 (ko) 2005-02-07 2007-01-17 (주)한빛레이저 레이저빔의 초점위치 고속이동형 집속장치
CN104842065B (zh) * 2015-05-28 2016-08-24 南京中车浦镇城轨车辆有限责任公司 一种基于压力传感的激光加工头辅助对焦装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512349B2 (enrdf_load_stackoverflow) * 1973-08-01 1980-04-01
JPS5270851A (en) * 1975-10-23 1977-06-13 Mitsubishi Electric Corp Focal point adjusting system for rays

Also Published As

Publication number Publication date
JPS60166185A (ja) 1985-08-29

Similar Documents

Publication Publication Date Title
SE8105214L (sv) Sett och apparat for detektering av fokusleget for en laseranordning
CN113634877A (zh) 一种激光加工装置及方法
JP3294985B2 (ja) 表面の曲率測定装置
JPH0231635B2 (enrdf_load_stackoverflow)
US6667458B1 (en) Spot size and distance characterization for a laser tool
JPH0642993B2 (ja) 距離計測装置
JPS5979122A (ja) レ−ザパワ−測定装置
JPS6125011A (ja) 光学式距離測定装置
JPS6138774Y2 (enrdf_load_stackoverflow)
JP2971003B2 (ja) レーザリペア装置のレンズの汚れを検出する装置
JPS5752807A (en) Device for measuring film thickness
JPS606755B2 (ja) 溶接管の外面溶接部断面形状検出装置
JPH1164521A (ja) レーザドップラ速度計
JPH0575051B2 (enrdf_load_stackoverflow)
JPH04111987A (ja) レーザー加工における被加工物位置合わせ方法
JPS6180212A (ja) 自動焦点検出機構
JPH01237091A (ja) レーザ加工装置
JPH07181006A (ja) レーザ測長器
JPH05280947A (ja) 光学的測定装置
JPS62127614A (ja) レ−ザ光による表面変位計測法
JPH0231103A (ja) パターン立体形状検知装置
JPH02133186A (ja) 炭酸ガスレーザ加工装置
JPS6186087A (ja) レ−ザ加工装置
JPH04313005A (ja) 膜厚測定装置
JPS6189509A (ja) レ−ザ加工機の距離計