SE8105214L - Sett och apparat for detektering av fokusleget for en laseranordning - Google Patents
Sett och apparat for detektering av fokusleget for en laseranordningInfo
- Publication number
- SE8105214L SE8105214L SE8105214A SE8105214A SE8105214L SE 8105214 L SE8105214 L SE 8105214L SE 8105214 A SE8105214 A SE 8105214A SE 8105214 A SE8105214 A SE 8105214A SE 8105214 L SE8105214 L SE 8105214L
- Authority
- SE
- Sweden
- Prior art keywords
- shielding member
- light shielding
- light sensor
- light
- optical axis
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
- G02B7/34—Systems for automatic generation of focusing signals using different areas in a pupil plane
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
- Automatic Focus Adjustment (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980124057U JPS6121191Y2 (sv) | 1980-09-02 | 1980-09-02 | |
JP55121682A JPS5746215A (en) | 1980-09-02 | 1980-09-02 | Method and device for detecting focal position in laser machining apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
SE8105214L true SE8105214L (sv) | 1982-03-03 |
SE447972B SE447972B (sv) | 1987-01-12 |
Family
ID=26458977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8105214A SE447972B (sv) | 1980-09-02 | 1981-09-02 | Sett och detektor for att detektera fokuspositionen for en med laser arbetande bearbetningsanordning |
Country Status (9)
Country | Link |
---|---|
US (1) | US4472055A (sv) |
AU (1) | AU552364B2 (sv) |
CA (1) | CA1173662A (sv) |
CH (1) | CH656568A5 (sv) |
DE (1) | DE3134555A1 (sv) |
FR (1) | FR2489195B1 (sv) |
GB (1) | GB2083216B (sv) |
IT (1) | IT1142728B (sv) |
SE (1) | SE447972B (sv) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57171592A (en) * | 1981-04-07 | 1982-10-22 | Amada Eng & Service | Laser working device |
US4734558A (en) * | 1983-05-16 | 1988-03-29 | Nec Corporation | Laser machining apparatus with controllable mask |
US4751376A (en) * | 1985-04-12 | 1988-06-14 | Minolta Camera Kabushiki Kaisha | Image reader with focus and magnification detection control |
DE3623409A1 (de) * | 1986-07-11 | 1988-01-21 | Bias Forschung & Entwicklung | Verfahren zur ueberwachung des bearbeitungsprozesses mit einer hochleistungsenergiequelle, insbesondere einem laser, und bearbeitungsoptik zur durchfuehrung desselben |
US5306902A (en) * | 1992-09-01 | 1994-04-26 | International Business Machines Corporation | Confocal method and apparatus for focusing in projection lithography |
SE9701710L (sv) * | 1997-05-07 | 1998-09-14 | Inst Verkstadstek Forsk Ivf | Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning |
EP1140415B1 (de) * | 1999-01-11 | 2004-06-02 | ThyssenKrupp Technologies AG | Einrichtung zum spannen und schweissen von blechen |
US6028662A (en) * | 1999-05-26 | 2000-02-22 | International Business Machines Corporation | Adjustment of particle beam landing angle |
US6617600B1 (en) * | 2000-02-16 | 2003-09-09 | Ultratech Stepper, Inc. | Radiation shield device and method |
US6467178B1 (en) * | 2000-09-11 | 2002-10-22 | Abb Automation Inc. | Method and apparatus for beam tool center point calibration |
US6649863B2 (en) * | 2001-01-16 | 2003-11-18 | Potomac Photonics, Inc. | Gemstone marking system with a focus sensing unit for sensing relative disposition between a marking surface of the gemstone and a focal plane of a laser beam |
US20030227614A1 (en) * | 2002-06-05 | 2003-12-11 | Taminiau August A. | Laser machining apparatus with automatic focusing |
JP2005088053A (ja) * | 2003-09-18 | 2005-04-07 | Disco Abrasive Syst Ltd | レーザー加工装置 |
KR100606447B1 (ko) * | 2003-12-24 | 2006-07-31 | 엘지.필립스 엘시디 주식회사 | 최적의 포컬 플레인 결정방법 및 이를 이용한 결정화방법 |
DE502005001790D1 (de) * | 2005-06-23 | 2007-12-06 | Trumpf Werkzeugmaschinen Gmbh | Verfahren zur bestimmung der fokuslage eines laserstrahls |
DE102010039633B4 (de) | 2010-08-23 | 2012-06-28 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Vorrichtung und Verfahren zur Bestimmung der Fokuslage eines zur Laser-Materialbearbeitung verwendeten Laserstrahls entlang der Laserstrahlachse |
DE102011006553B4 (de) * | 2011-03-31 | 2013-04-11 | Trumpf Laser Gmbh + Co. Kg | Verfahren zum Ermitteln der Fokuslage eines Laserstrahls in seinem Arbeitsfeld oder Arbeitsraum |
CN105014240B (zh) * | 2014-04-29 | 2017-04-05 | 中国科学院福建物质结构研究所 | Led晶圆激光切割装置和led晶圆激光切割调水平方法 |
CN109323849B (zh) * | 2017-08-01 | 2021-02-19 | 大族激光科技产业集团股份有限公司 | 一种光纤切割头零焦点测量系统和测量方法 |
CN114951964B (zh) * | 2022-07-04 | 2024-04-26 | 西安理工大学 | 适用于低中高功率激光的焦点判定装置及定焦方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2524807A (en) * | 1947-03-28 | 1950-10-10 | Heinz E Kallmann | Optical automatic range determining device |
GB719700A (en) * | 1951-05-18 | 1954-12-08 | Kodak Ltd | Method of and apparatus for testing lenses |
FR94871E (fr) * | 1967-05-18 | 1970-01-16 | Cilas | Procédé et dispositif de palpage optique. |
GB1284809A (en) * | 1970-06-11 | 1972-08-09 | Mitsubishi Electric Corp | A laser processing apparatus |
US3689159A (en) * | 1970-06-11 | 1972-09-05 | Mitsubishi Electric Corp | Laser processing apparatus |
JPS5227531B1 (sv) * | 1970-12-22 | 1977-07-21 | ||
SU464796A1 (ru) * | 1973-04-13 | 1975-03-25 | Ленинградский Институт Точной Механики И Оптики | Оптико-электронное устройство дл анализа положени плоскости изображени |
US3997715A (en) * | 1974-03-25 | 1976-12-14 | Mca Disco-Vision, Inc. | Focusing system for videodisc player |
DE2555493A1 (de) * | 1974-12-19 | 1976-06-24 | Gen Electric | Opto-elektronisches geraet zur erfassung der lage und verfahren |
US4009392A (en) * | 1976-01-26 | 1977-02-22 | The United States Of America As Represented By The Secretary Of The Navy | Radiation focus meter |
DE2836428A1 (de) * | 1978-08-19 | 1980-03-06 | Battelle Institut E V | Verfahren und vorrichtung zur automatischen scharfeinstellung von objektiven |
DE2837555A1 (de) * | 1978-08-29 | 1980-03-20 | Leitz Ernst Gmbh | Elektronische scharfstelleinrichtung |
US4322616A (en) * | 1979-03-22 | 1982-03-30 | Nippon Kogaku K.K. | Focus detecting device with shielding |
-
1981
- 1981-09-01 AU AU74807/81A patent/AU552364B2/en not_active Ceased
- 1981-09-01 GB GB8126508A patent/GB2083216B/en not_active Expired
- 1981-09-01 IT IT49209/81A patent/IT1142728B/it active
- 1981-09-01 US US06/298,329 patent/US4472055A/en not_active Expired - Fee Related
- 1981-09-01 DE DE19813134555 patent/DE3134555A1/de active Granted
- 1981-09-02 FR FR8116724A patent/FR2489195B1/fr not_active Expired
- 1981-09-02 CH CH5655/81A patent/CH656568A5/de not_active IP Right Cessation
- 1981-09-02 SE SE8105214A patent/SE447972B/sv not_active IP Right Cessation
- 1981-09-02 CA CA000385022A patent/CA1173662A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE3134555A1 (de) | 1982-07-08 |
AU552364B2 (en) | 1986-05-29 |
IT1142728B (it) | 1986-10-15 |
GB2083216A (en) | 1982-03-17 |
SE447972B (sv) | 1987-01-12 |
US4472055A (en) | 1984-09-18 |
CH656568A5 (de) | 1986-07-15 |
FR2489195A1 (fr) | 1982-03-05 |
AU7480781A (en) | 1982-03-11 |
GB2083216B (en) | 1984-01-11 |
CA1173662A (en) | 1984-09-04 |
FR2489195B1 (fr) | 1986-06-27 |
IT8149209A0 (it) | 1981-09-01 |
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