JPH0231032B2 - - Google Patents
Info
- Publication number
- JPH0231032B2 JPH0231032B2 JP60256753A JP25675385A JPH0231032B2 JP H0231032 B2 JPH0231032 B2 JP H0231032B2 JP 60256753 A JP60256753 A JP 60256753A JP 25675385 A JP25675385 A JP 25675385A JP H0231032 B2 JPH0231032 B2 JP H0231032B2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- molded body
- cylindrical
- material molded
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002994 raw material Substances 0.000 claims description 36
- 239000000919 ceramic Substances 0.000 claims description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 28
- 229910002804 graphite Inorganic materials 0.000 claims description 28
- 239000010439 graphite Substances 0.000 claims description 28
- 238000005245 sintering Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 10
- 230000004323 axial length Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 230000008602 contraction Effects 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 239000008187 granular material Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012752 auxiliary agent Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60256753A JPS62119169A (ja) | 1985-11-18 | 1985-11-18 | 円筒状セラミツクス原料成形体の焼結方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60256753A JPS62119169A (ja) | 1985-11-18 | 1985-11-18 | 円筒状セラミツクス原料成形体の焼結方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62119169A JPS62119169A (ja) | 1987-05-30 |
| JPH0231032B2 true JPH0231032B2 (enrdf_load_stackoverflow) | 1990-07-11 |
Family
ID=17296965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60256753A Granted JPS62119169A (ja) | 1985-11-18 | 1985-11-18 | 円筒状セラミツクス原料成形体の焼結方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62119169A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03137063A (ja) * | 1989-10-19 | 1991-06-11 | Showa Denko Kk | セラミックスの焼結方法 |
| JP6464666B2 (ja) * | 2014-10-29 | 2019-02-06 | 住友金属鉱山株式会社 | 円筒形ターゲット材とその製造方法、および、円筒形スパッタリングターゲットとその製造方法 |
-
1985
- 1985-11-18 JP JP60256753A patent/JPS62119169A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62119169A (ja) | 1987-05-30 |
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