JPH02301704A - 基板間光学要素のマスクにてコントロールされた結合 - Google Patents
基板間光学要素のマスクにてコントロールされた結合Info
- Publication number
- JPH02301704A JPH02301704A JP2110695A JP11069590A JPH02301704A JP H02301704 A JPH02301704 A JP H02301704A JP 2110695 A JP2110695 A JP 2110695A JP 11069590 A JP11069590 A JP 11069590A JP H02301704 A JPH02301704 A JP H02301704A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- substrate
- planar
- alignment means
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 175
- 239000000758 substrate Substances 0.000 title claims abstract description 140
- 230000008878 coupling Effects 0.000 title description 2
- 238000010168 coupling process Methods 0.000 title description 2
- 238000005859 coupling reaction Methods 0.000 title description 2
- 238000004519 manufacturing process Methods 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims description 25
- 238000005530 etching Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 10
- 238000013459 approach Methods 0.000 description 20
- 238000003384 imaging method Methods 0.000 description 10
- 230000008901 benefit Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 238000003491 array Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000013011 mating Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000000306 component Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- MZQZQKZKTGRQCG-UHFFFAOYSA-J thorium tetrafluoride Chemical compound F[Th](F)(F)F MZQZQKZKTGRQCG-UHFFFAOYSA-J 0.000 description 2
- 241000218645 Cedrus Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000001668 ameliorated effect Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 230000036461 convulsion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US345,754 | 1989-04-28 | ||
| US07/345,754 US4966446A (en) | 1989-04-28 | 1989-04-28 | Mask controlled coupling of inter-substrate optical components |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02301704A true JPH02301704A (ja) | 1990-12-13 |
Family
ID=23356351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2110695A Pending JPH02301704A (ja) | 1989-04-28 | 1990-04-27 | 基板間光学要素のマスクにてコントロールされた結合 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4966446A (de) |
| EP (1) | EP0394866B1 (de) |
| JP (1) | JPH02301704A (de) |
| DE (1) | DE69023266T2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5317551A (en) * | 1990-07-16 | 1994-05-31 | Matsushita Electric Industrial Co., Ltd. | Optical disk head including a light path having a thickness and width greater than the light beam wavelength by a predetermined amount |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991012551A1 (en) * | 1990-02-14 | 1991-08-22 | Massachusetts Institute Of Technology | Lens/zone plate combination for chromatic dispersion correction |
| US5255112A (en) * | 1990-12-20 | 1993-10-19 | Hitachi, Ltd. | Optical scanning apparatus and system |
| US5153772A (en) * | 1991-04-09 | 1992-10-06 | Toledyne Industries, Inc. | Binary optic-corrected multistage imaging system |
| JPH05323141A (ja) * | 1992-05-20 | 1993-12-07 | Furukawa Electric Co Ltd:The | 光部品の製造方法 |
| CH684556A5 (de) * | 1992-09-14 | 1994-10-14 | Cerberus Ag | Optischer Rauchmelder. |
| US5760834A (en) * | 1992-09-30 | 1998-06-02 | Lsi Logic | Electronic camera with binary lens element array |
| US5340978A (en) * | 1992-09-30 | 1994-08-23 | Lsi Logic Corporation | Image-sensing display panels with LCD display panel and photosensitive element array |
| US5529936A (en) * | 1992-09-30 | 1996-06-25 | Lsi Logic Corporation | Method of etching a lens for a semiconductor solid state image sensor |
| US5566024A (en) * | 1993-12-23 | 1996-10-15 | Xerox Corporation | Beam separation control and beam splitting by single blazed binary diffraction optical element |
| US5537252A (en) * | 1993-12-23 | 1996-07-16 | Xerox Corporation | Double blazed binary diffraction optical element beam splitter |
| US5912872A (en) * | 1996-09-27 | 1999-06-15 | Digital Optics Corporation | Integrated optical apparatus providing separated beams on a detector and associated methods |
| US6420202B1 (en) | 2000-05-16 | 2002-07-16 | Agere Systems Guardian Corp. | Method for shaping thin film resonators to shape acoustic modes therein |
| US7880255B2 (en) * | 2004-07-19 | 2011-02-01 | Micron Technology, Inc. | Pixel cell having a grated interface |
| CN101850625B (zh) * | 2009-03-30 | 2013-06-05 | 鸿富锦精密工业（深圳）有限公司 | 制造光学元件的方法 |
| US8928133B2 (en) * | 2012-05-07 | 2015-01-06 | M/A-Com Technology Solutions Holdings, Inc. | Interlocking type solder connections for alignment and bonding of wafers and/or substrates |
| US10270947B2 (en) | 2016-09-15 | 2019-04-23 | Microsoft Technology Licensing, Llc | Flat digital image sensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3631360A (en) * | 1967-07-13 | 1971-12-28 | Kurt Lehovec | Electro-optical structures utilizing fresnel optical systems |
| US4079404A (en) * | 1976-12-30 | 1978-03-14 | International Business Machines Corporation | Self-aligning support structure for optical components |
| US4499608A (en) * | 1983-01-12 | 1985-02-12 | International Business Machines Corporation | Terminal device having closed chamber communications between functional units |
| FR2590995B1 (fr) * | 1985-02-26 | 1988-08-19 | Thomson Csf | Dispositif d'interconnexion optique de cartes de composants electroniques dans un coffret et procede de fabrication |
-
1989
- 1989-04-28 US US07/345,754 patent/US4966446A/en not_active Expired - Lifetime
-
1990
- 1990-04-20 DE DE69023266T patent/DE69023266T2/de not_active Expired - Fee Related
- 1990-04-20 EP EP90107522A patent/EP0394866B1/de not_active Expired - Lifetime
- 1990-04-27 JP JP2110695A patent/JPH02301704A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5317551A (en) * | 1990-07-16 | 1994-05-31 | Matsushita Electric Industrial Co., Ltd. | Optical disk head including a light path having a thickness and width greater than the light beam wavelength by a predetermined amount |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0394866B1 (de) | 1995-11-02 |
| DE69023266D1 (de) | 1995-12-07 |
| EP0394866A2 (de) | 1990-10-31 |
| US4966446A (en) | 1990-10-30 |
| EP0394866A3 (de) | 1991-11-13 |
| DE69023266T2 (de) | 1996-07-04 |
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