DE69023266T2 - Maskenkontrollierte Kopplung zwischen optischen Komponenten auf einem Substrat. - Google Patents

Maskenkontrollierte Kopplung zwischen optischen Komponenten auf einem Substrat.

Info

Publication number
DE69023266T2
DE69023266T2 DE69023266T DE69023266T DE69023266T2 DE 69023266 T2 DE69023266 T2 DE 69023266T2 DE 69023266 T DE69023266 T DE 69023266T DE 69023266 T DE69023266 T DE 69023266T DE 69023266 T2 DE69023266 T2 DE 69023266T2
Authority
DE
Germany
Prior art keywords
mask
substrate
optical components
controlled coupling
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69023266T
Other languages
English (en)
Other versions
DE69023266D1 (de
Inventor
Alan Huang
Juergen Jahns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of DE69023266D1 publication Critical patent/DE69023266D1/de
Application granted granted Critical
Publication of DE69023266T2 publication Critical patent/DE69023266T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
DE69023266T 1989-04-28 1990-04-20 Maskenkontrollierte Kopplung zwischen optischen Komponenten auf einem Substrat. Expired - Fee Related DE69023266T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/345,754 US4966446A (en) 1989-04-28 1989-04-28 Mask controlled coupling of inter-substrate optical components

Publications (2)

Publication Number Publication Date
DE69023266D1 DE69023266D1 (de) 1995-12-07
DE69023266T2 true DE69023266T2 (de) 1996-07-04

Family

ID=23356351

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69023266T Expired - Fee Related DE69023266T2 (de) 1989-04-28 1990-04-20 Maskenkontrollierte Kopplung zwischen optischen Komponenten auf einem Substrat.

Country Status (4)

Country Link
US (1) US4966446A (de)
EP (1) EP0394866B1 (de)
JP (1) JPH02301704A (de)
DE (1) DE69023266T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991012551A1 (en) * 1990-02-14 1991-08-22 Massachusetts Institute Of Technology Lens/zone plate combination for chromatic dispersion correction
US5317551A (en) * 1990-07-16 1994-05-31 Matsushita Electric Industrial Co., Ltd. Optical disk head including a light path having a thickness and width greater than the light beam wavelength by a predetermined amount
US5255112A (en) * 1990-12-20 1993-10-19 Hitachi, Ltd. Optical scanning apparatus and system
US5153772A (en) * 1991-04-09 1992-10-06 Toledyne Industries, Inc. Binary optic-corrected multistage imaging system
JPH05323141A (ja) * 1992-05-20 1993-12-07 Furukawa Electric Co Ltd:The 光部品の製造方法
CH684556A5 (de) * 1992-09-14 1994-10-14 Cerberus Ag Optischer Rauchmelder.
US5760834A (en) * 1992-09-30 1998-06-02 Lsi Logic Electronic camera with binary lens element array
US5340978A (en) * 1992-09-30 1994-08-23 Lsi Logic Corporation Image-sensing display panels with LCD display panel and photosensitive element array
US5529936A (en) * 1992-09-30 1996-06-25 Lsi Logic Corporation Method of etching a lens for a semiconductor solid state image sensor
US5566024A (en) * 1993-12-23 1996-10-15 Xerox Corporation Beam separation control and beam splitting by single blazed binary diffraction optical element
US5537252A (en) * 1993-12-23 1996-07-16 Xerox Corporation Double blazed binary diffraction optical element beam splitter
US5912872A (en) * 1996-09-27 1999-06-15 Digital Optics Corporation Integrated optical apparatus providing separated beams on a detector and associated methods
US6420202B1 (en) 2000-05-16 2002-07-16 Agere Systems Guardian Corp. Method for shaping thin film resonators to shape acoustic modes therein
US7880255B2 (en) * 2004-07-19 2011-02-01 Micron Technology, Inc. Pixel cell having a grated interface
CN101850625B (zh) * 2009-03-30 2013-06-05 鸿富锦精密工业（深圳）有限公司 制造光学元件的方法
US8928133B2 (en) * 2012-05-07 2015-01-06 M/A-Com Technology Solutions Holdings, Inc. Interlocking type solder connections for alignment and bonding of wafers and/or substrates
US10270947B2 (en) 2016-09-15 2019-04-23 Microsoft Technology Licensing, Llc Flat digital image sensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631360A (en) * 1967-07-13 1971-12-28 Kurt Lehovec Electro-optical structures utilizing fresnel optical systems
US4079404A (en) * 1976-12-30 1978-03-14 International Business Machines Corporation Self-aligning support structure for optical components
US4499608A (en) * 1983-01-12 1985-02-12 International Business Machines Corporation Terminal device having closed chamber communications between functional units
FR2590995B1 (fr) * 1985-02-26 1988-08-19 Thomson Csf Dispositif d'interconnexion optique de cartes de composants electroniques dans un coffret et procede de fabrication

Also Published As

Publication number Publication date
EP0394866B1 (de) 1995-11-02
DE69023266D1 (de) 1995-12-07
EP0394866A2 (de) 1990-10-31
US4966446A (en) 1990-10-30
EP0394866A3 (de) 1991-11-13
JPH02301704A (ja) 1990-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee