JPH0229745B2 - - Google Patents

Info

Publication number
JPH0229745B2
JPH0229745B2 JP57151210A JP15121082A JPH0229745B2 JP H0229745 B2 JPH0229745 B2 JP H0229745B2 JP 57151210 A JP57151210 A JP 57151210A JP 15121082 A JP15121082 A JP 15121082A JP H0229745 B2 JPH0229745 B2 JP H0229745B2
Authority
JP
Japan
Prior art keywords
graphite
aluminum
silicon carbide
crucible
graphite crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57151210A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5941472A (ja
Inventor
Shigeo Yasuda
Yoshiji Aoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP15121082A priority Critical patent/JPS5941472A/ja
Publication of JPS5941472A publication Critical patent/JPS5941472A/ja
Publication of JPH0229745B2 publication Critical patent/JPH0229745B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP15121082A 1982-08-31 1982-08-31 黒鉛ルツボ Granted JPS5941472A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15121082A JPS5941472A (ja) 1982-08-31 1982-08-31 黒鉛ルツボ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15121082A JPS5941472A (ja) 1982-08-31 1982-08-31 黒鉛ルツボ

Publications (2)

Publication Number Publication Date
JPS5941472A JPS5941472A (ja) 1984-03-07
JPH0229745B2 true JPH0229745B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-07-02

Family

ID=15513638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15121082A Granted JPS5941472A (ja) 1982-08-31 1982-08-31 黒鉛ルツボ

Country Status (1)

Country Link
JP (1) JPS5941472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6133997U (ja) * 1984-08-01 1986-03-01 三菱電機株式会社 ロ−タリ圧縮機の消音構造
DE3538857A1 (de) * 1985-11-02 1987-05-07 Leybold Heraeus Gmbh & Co Kg Einrichtung fuer die eingabe eines sollwerts fuer den auftreffpunkt eines elektronenstrahls auf ein medium
JPH01151196U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-04-11 1989-10-18
JPH04308076A (ja) * 1991-04-03 1992-10-30 Mitsubishi Heavy Ind Ltd 昇華性物質真空蒸着装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5055540A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-09-17 1975-05-15
JPS5170191A (ja) * 1974-12-16 1976-06-17 Ibigawa Electric Ind Co Ltd Tankakeisohimakukeiseihoho
JPS5727984A (en) * 1980-07-24 1982-02-15 B Purojiekutou Puruzemisuru Me Corrosion suppressive protection for silicon carbide product

Also Published As

Publication number Publication date
JPS5941472A (ja) 1984-03-07

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