JPH0229166Y2 - - Google Patents
Info
- Publication number
- JPH0229166Y2 JPH0229166Y2 JP12835885U JP12835885U JPH0229166Y2 JP H0229166 Y2 JPH0229166 Y2 JP H0229166Y2 JP 12835885 U JP12835885 U JP 12835885U JP 12835885 U JP12835885 U JP 12835885U JP H0229166 Y2 JPH0229166 Y2 JP H0229166Y2
- Authority
- JP
- Japan
- Prior art keywords
- window
- inspection port
- environmental chamber
- opened
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007613 environmental effect Effects 0.000 claims description 20
- 238000007689 inspection Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12835885U JPH0229166Y2 (US06262066-20010717-C00315.png) | 1985-08-24 | 1985-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12835885U JPH0229166Y2 (US06262066-20010717-C00315.png) | 1985-08-24 | 1985-08-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6238529U JPS6238529U (US06262066-20010717-C00315.png) | 1987-03-07 |
| JPH0229166Y2 true JPH0229166Y2 (US06262066-20010717-C00315.png) | 1990-08-06 |
Family
ID=31023953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12835885U Expired JPH0229166Y2 (US06262066-20010717-C00315.png) | 1985-08-24 | 1985-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229166Y2 (US06262066-20010717-C00315.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2636855B2 (ja) * | 1987-09-21 | 1997-07-30 | 株式会社青木建設 | 移動設置可能な多目的実験室 |
| JPH02111253U (US06262066-20010717-C00315.png) * | 1989-02-27 | 1990-09-05 |
-
1985
- 1985-08-24 JP JP12835885U patent/JPH0229166Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6238529U (US06262066-20010717-C00315.png) | 1987-03-07 |
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