JPH0228030Y2 - - Google Patents
Info
- Publication number
- JPH0228030Y2 JPH0228030Y2 JP884985U JP884985U JPH0228030Y2 JP H0228030 Y2 JPH0228030 Y2 JP H0228030Y2 JP 884985 U JP884985 U JP 884985U JP 884985 U JP884985 U JP 884985U JP H0228030 Y2 JPH0228030 Y2 JP H0228030Y2
- Authority
- JP
- Japan
- Prior art keywords
- spinner table
- motor
- drive
- pulse
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005520 cutting process Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 15
- 238000001035 drying Methods 0.000 description 8
- 238000005406 washing Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 5
- 239000002390 adhesive tape Substances 0.000 description 3
- 238000010924 continuous production Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP884985U JPH0228030Y2 (enrdf_load_stackoverflow) | 1985-01-25 | 1985-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP884985U JPH0228030Y2 (enrdf_load_stackoverflow) | 1985-01-25 | 1985-01-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125406U JPS61125406U (enrdf_load_stackoverflow) | 1986-08-07 |
| JPH0228030Y2 true JPH0228030Y2 (enrdf_load_stackoverflow) | 1990-07-27 |
Family
ID=30488513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP884985U Expired JPH0228030Y2 (enrdf_load_stackoverflow) | 1985-01-25 | 1985-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0228030Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-01-25 JP JP884985U patent/JPH0228030Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61125406U (enrdf_load_stackoverflow) | 1986-08-07 |
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