JPH0223852B2 - - Google Patents

Info

Publication number
JPH0223852B2
JPH0223852B2 JP14779481A JP14779481A JPH0223852B2 JP H0223852 B2 JPH0223852 B2 JP H0223852B2 JP 14779481 A JP14779481 A JP 14779481A JP 14779481 A JP14779481 A JP 14779481A JP H0223852 B2 JPH0223852 B2 JP H0223852B2
Authority
JP
Japan
Prior art keywords
light
slit member
illuminance distribution
length direction
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14779481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5849932A (ja
Inventor
Takeshi Sugihara
Akira Satomi
Kenji Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP14779481A priority Critical patent/JPS5849932A/ja
Publication of JPS5849932A publication Critical patent/JPS5849932A/ja
Publication of JPH0223852B2 publication Critical patent/JPH0223852B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/54—Lamp housings; Illuminating means
    • G03B27/542—Lamp housings; Illuminating means for copying cameras, reflex exposure lighting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
JP14779481A 1981-09-21 1981-09-21 照度分布パタ−ンの調整器 Granted JPS5849932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14779481A JPS5849932A (ja) 1981-09-21 1981-09-21 照度分布パタ−ンの調整器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14779481A JPS5849932A (ja) 1981-09-21 1981-09-21 照度分布パタ−ンの調整器

Publications (2)

Publication Number Publication Date
JPS5849932A JPS5849932A (ja) 1983-03-24
JPH0223852B2 true JPH0223852B2 (enrdf_load_stackoverflow) 1990-05-25

Family

ID=15438352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14779481A Granted JPS5849932A (ja) 1981-09-21 1981-09-21 照度分布パタ−ンの調整器

Country Status (1)

Country Link
JP (1) JPS5849932A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090077827A (ko) 2003-04-09 2009-07-15 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TWI573175B (zh) 2003-10-28 2017-03-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法
TWI385414B (zh) 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法
TW201809727A (zh) 2004-02-06 2018-03-16 日商尼康股份有限公司 偏光變換元件
KR20140140648A (ko) 2005-05-12 2014-12-09 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
WO2008053881A1 (fr) * 2006-11-01 2008-05-08 Nikon Corporation Plaque de gradateur, appareil d'exposition, procédé d'exposition et procédé de fabrication du dispositif
JP2008282689A (ja) * 2007-05-11 2008-11-20 Iwasaki Electric Co Ltd 照明器具
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US8120833B2 (en) * 2010-07-08 2012-02-21 Lighthouse Technologies Limited Variable space shutter for LED display

Also Published As

Publication number Publication date
JPS5849932A (ja) 1983-03-24

Similar Documents

Publication Publication Date Title
JPH0223852B2 (enrdf_load_stackoverflow)
US3544190A (en) Lens strip optical scanning system
US4154500A (en) Exposure optical system for electrostatic copying machine or the like
JP2002543375A (ja) 光学位置測定装置
US4213690A (en) Copying apparatus having a high-speed copying optical system
US4090788A (en) Optical copying machine
KR19980702257A (ko) 기판의 폭에 이르는 화상 영역을 갖는 임의의 광 렌즈 어레이
JPS5922932B2 (ja) 変倍複写機における照度むら補正装置
JP2000501517A (ja) グレーティングを書き込むための環状干渉計配置構成
US6751381B1 (en) Embodying amplitude information into phase masks
US4728995A (en) Device for adjusting exposure amount
US4003649A (en) Electrophotographic halftone printing machine employing a phase screen
US4401384A (en) Mirror device of copying machine or the like
JPH05248818A (ja) 光学式エンコーダ
TWI284923B (en) Method of reducing pitch on a semiconductor wafer
JPH05297256A (ja) 光学部材保持装置
JP2001100135A (ja) 走査光学装置
JPS60123832A (ja) 変倍複写機の光量補正装置
JP2887820B2 (ja) 変倍可能なスリット走査装置における光量調節装置
SU615356A1 (ru) Оптическое устройство дл разметки поверхностей изделий
JPS5868062A (ja) 画像形成装置
JPH03160411A (ja) レーザ光走査装置
US4280752A (en) Solid-medium coherent optical processor
JPH07333750A (ja) 画像形成装置の照明装置
KR950003339Y1 (ko) 반사경 각도 조정장치