JPS5849932A - 照度分布パタ−ンの調整器 - Google Patents

照度分布パタ−ンの調整器

Info

Publication number
JPS5849932A
JPS5849932A JP14779481A JP14779481A JPS5849932A JP S5849932 A JPS5849932 A JP S5849932A JP 14779481 A JP14779481 A JP 14779481A JP 14779481 A JP14779481 A JP 14779481A JP S5849932 A JPS5849932 A JP S5849932A
Authority
JP
Japan
Prior art keywords
light
slit member
illuminance distribution
distribution pattern
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14779481A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0223852B2 (enrdf_load_stackoverflow
Inventor
Takeshi Sugihara
杉原　壮
Akira Satomi
里見　昭
Kenji Imamura
賢二 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP14779481A priority Critical patent/JPS5849932A/ja
Publication of JPS5849932A publication Critical patent/JPS5849932A/ja
Publication of JPH0223852B2 publication Critical patent/JPH0223852B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/54—Lamp housings; Illuminating means
    • G03B27/542—Lamp housings; Illuminating means for copying cameras, reflex exposure lighting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
JP14779481A 1981-09-21 1981-09-21 照度分布パタ−ンの調整器 Granted JPS5849932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14779481A JPS5849932A (ja) 1981-09-21 1981-09-21 照度分布パタ−ンの調整器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14779481A JPS5849932A (ja) 1981-09-21 1981-09-21 照度分布パタ−ンの調整器

Publications (2)

Publication Number Publication Date
JPS5849932A true JPS5849932A (ja) 1983-03-24
JPH0223852B2 JPH0223852B2 (enrdf_load_stackoverflow) 1990-05-25

Family

ID=15438352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14779481A Granted JPS5849932A (ja) 1981-09-21 1981-09-21 照度分布パタ−ンの調整器

Country Status (1)

Country Link
JP (1) JPS5849932A (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008053881A1 (fr) * 2006-11-01 2008-05-08 Nikon Corporation Plaque de gradateur, appareil d'exposition, procédé d'exposition et procédé de fabrication du dispositif
JP2008282689A (ja) * 2007-05-11 2008-11-20 Iwasaki Electric Co Ltd 照明器具
JP2013530503A (ja) * 2010-07-08 2013-07-25 ライトハウス・テクノロジーズ・リミテッド Ｌｅｄディスプレイのためのスペース可変シャッター
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US8854601B2 (en) 2005-05-12 2014-10-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885959B2 (en) 2003-04-09 2018-02-06 Nikon Corporation Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9760014B2 (en) 2003-10-28 2017-09-12 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US10281632B2 (en) 2003-11-20 2019-05-07 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US10241417B2 (en) 2004-02-06 2019-03-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10234770B2 (en) 2004-02-06 2019-03-19 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10007194B2 (en) 2004-02-06 2018-06-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US9310696B2 (en) 2005-05-12 2016-04-12 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9429851B2 (en) 2005-05-12 2016-08-30 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9360763B2 (en) 2005-05-12 2016-06-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US8854601B2 (en) 2005-05-12 2014-10-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
WO2008053881A1 (fr) * 2006-11-01 2008-05-08 Nikon Corporation Plaque de gradateur, appareil d'exposition, procédé d'exposition et procédé de fabrication du dispositif
JP2008282689A (ja) * 2007-05-11 2008-11-20 Iwasaki Electric Co Ltd 照明器具
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method
US9857599B2 (en) 2007-10-24 2018-01-02 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP2013530503A (ja) * 2010-07-08 2013-07-25 ライトハウス・テクノロジーズ・リミテッド Ｌｅｄディスプレイのためのスペース可変シャッター

Also Published As

Publication number Publication date
JPH0223852B2 (enrdf_load_stackoverflow) 1990-05-25

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