JPH02235017A - 光シャッタアレイ及びその製造方法 - Google Patents

光シャッタアレイ及びその製造方法

Info

Publication number
JPH02235017A
JPH02235017A JP5494289A JP5494289A JPH02235017A JP H02235017 A JPH02235017 A JP H02235017A JP 5494289 A JP5494289 A JP 5494289A JP 5494289 A JP5494289 A JP 5494289A JP H02235017 A JPH02235017 A JP H02235017A
Authority
JP
Japan
Prior art keywords
substrate
electrodes
shutter array
individual
optical shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5494289A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529890B2 (enrdf_load_stackoverflow
Inventor
Hidenori Sukigara
鋤柄　英則
Kazuo Kobayashi
一雄 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Priority to JP5494289A priority Critical patent/JPH02235017A/ja
Priority to PCT/JP1990/000310 priority patent/WO1990010887A1/ja
Publication of JPH02235017A publication Critical patent/JPH02235017A/ja
Publication of JPH0529890B2 publication Critical patent/JPH0529890B2/ja
Granted legal-status Critical Current

Links

JP5494289A 1989-03-09 1989-03-09 光シャッタアレイ及びその製造方法 Granted JPH02235017A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP5494289A JPH02235017A (ja) 1989-03-09 1989-03-09 光シャッタアレイ及びその製造方法
PCT/JP1990/000310 WO1990010887A1 (en) 1989-03-09 1990-03-09 Light shutter array and method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5494289A JPH02235017A (ja) 1989-03-09 1989-03-09 光シャッタアレイ及びその製造方法

Publications (2)

Publication Number Publication Date
JPH02235017A true JPH02235017A (ja) 1990-09-18
JPH0529890B2 JPH0529890B2 (enrdf_load_stackoverflow) 1993-05-06

Family

ID=12984697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5494289A Granted JPH02235017A (ja) 1989-03-09 1989-03-09 光シャッタアレイ及びその製造方法

Country Status (1)

Country Link
JP (1) JPH02235017A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024135076A1 (ja) * 2022-12-23 2024-06-27 日本碍子株式会社 波長変換素子の製造方法、波長変換素子

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63189836A (ja) * 1987-02-02 1988-08-05 Minolta Camera Co Ltd 光シヤツタアレイ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63189836A (ja) * 1987-02-02 1988-08-05 Minolta Camera Co Ltd 光シヤツタアレイ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024135076A1 (ja) * 2022-12-23 2024-06-27 日本碍子株式会社 波長変換素子の製造方法、波長変換素子

Also Published As

Publication number Publication date
JPH0529890B2 (enrdf_load_stackoverflow) 1993-05-06

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