JPH0222998B2 - - Google Patents
Info
- Publication number
- JPH0222998B2 JPH0222998B2 JP57155617A JP15561782A JPH0222998B2 JP H0222998 B2 JPH0222998 B2 JP H0222998B2 JP 57155617 A JP57155617 A JP 57155617A JP 15561782 A JP15561782 A JP 15561782A JP H0222998 B2 JPH0222998 B2 JP H0222998B2
- Authority
- JP
- Japan
- Prior art keywords
- corona discharge
- dielectric layer
- linear
- creeping
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 claims description 81
- 239000002994 raw material Substances 0.000 claims description 39
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 21
- 230000006698 induction Effects 0.000 claims description 19
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 19
- 229910052721 tungsten Inorganic materials 0.000 claims description 14
- 239000010937 tungsten Substances 0.000 claims description 14
- 229910052573 porcelain Inorganic materials 0.000 claims description 13
- 239000011241 protective layer Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000003989 dielectric material Substances 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000011230 binding agent Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 description 17
- 239000004020 conductor Substances 0.000 description 15
- 230000005684 electric field Effects 0.000 description 11
- 239000007789 gas Substances 0.000 description 11
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 9
- 230000008646 thermal stress Effects 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000005596 ionic collisions Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Elimination Of Static Electricity (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57155617A JPS5944782A (ja) | 1982-09-07 | 1982-09-07 | 沿面コロナ放電素子およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57155617A JPS5944782A (ja) | 1982-09-07 | 1982-09-07 | 沿面コロナ放電素子およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5944782A JPS5944782A (ja) | 1984-03-13 |
| JPH0222998B2 true JPH0222998B2 (US08063081-20111122-C00044.png) | 1990-05-22 |
Family
ID=15609921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57155617A Granted JPS5944782A (ja) | 1982-09-07 | 1982-09-07 | 沿面コロナ放電素子およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5944782A (US08063081-20111122-C00044.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0237199U (US08063081-20111122-C00044.png) * | 1988-08-31 | 1990-03-12 | ||
| US7160365B2 (en) | 2003-03-10 | 2007-01-09 | Sharp Kabushiki Kaisha | Ion generating apparatus, air conditioning apparatus, and charging apparatus |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6057121U (ja) * | 1983-09-28 | 1985-04-20 | 増田 閃一 | 沿面コロナ放電素子 |
| US4666679A (en) * | 1984-07-18 | 1987-05-19 | Ngk Spark Plug Co., Ltd. | Ceramic ozonizer |
| JPH0519298Y2 (US08063081-20111122-C00044.png) * | 1987-04-16 | 1993-05-21 | ||
| EP0300452B1 (en) * | 1987-07-23 | 1991-11-06 | Asahi Glass Company Ltd. | Field formation apparatus |
| JPH0764523B2 (ja) * | 1988-03-25 | 1995-07-12 | 京セラ株式会社 | オゾン発生用放電体 |
| JPH03236900A (ja) * | 1990-02-14 | 1991-10-22 | Sharp Corp | 衣類乾燥機 |
| JPH0810935Y2 (ja) * | 1990-03-30 | 1996-03-29 | 日本特殊陶業株式会社 | 電界装置 |
| JP2002117956A (ja) * | 2000-10-04 | 2002-04-19 | Sharp Corp | イオン発生装置及びそれを備えた空気清浄機並びに空気調和機 |
| JP5576057B2 (ja) * | 2009-04-24 | 2014-08-20 | パナソニック株式会社 | オゾン発生装置 |
| JP5664792B2 (ja) * | 2011-09-20 | 2015-02-04 | 株式会社村田製作所 | オゾン発生装置およびその製造方法 |
| JP6175721B2 (ja) * | 2012-11-09 | 2017-08-09 | 株式会社渡辺商行 | オゾン発生装置、及び、オゾン発生方法 |
| CN109196741B (zh) * | 2016-06-03 | 2020-10-16 | 日本碍子株式会社 | 电荷产生元件以及微粒数检测器 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2085735A (en) * | 1930-12-04 | 1937-07-06 | Internat Precipitation Co | Apparatus for effecting ionization in gases |
| JPS5122659A (en) * | 1974-08-19 | 1976-02-23 | Sumitomo Light Metal Ind | Kinzokuno chokusetsuoshidashihoho |
| JPS557564A (en) * | 1978-06-30 | 1980-01-19 | Sumitomo Precision Prod Co Ltd | Ozonizer |
| JPS5537483A (en) * | 1978-07-13 | 1980-03-15 | Saint Gobain | Layered window glass and producing same |
| JPS56120507A (en) * | 1980-02-23 | 1981-09-21 | Senichi Masuda | Ozonizer |
| JPS576385A (en) * | 1980-06-12 | 1982-01-13 | Citizen Watch Co Ltd | Movement structure of digital watch |
-
1982
- 1982-09-07 JP JP57155617A patent/JPS5944782A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2085735A (en) * | 1930-12-04 | 1937-07-06 | Internat Precipitation Co | Apparatus for effecting ionization in gases |
| JPS5122659A (en) * | 1974-08-19 | 1976-02-23 | Sumitomo Light Metal Ind | Kinzokuno chokusetsuoshidashihoho |
| JPS557564A (en) * | 1978-06-30 | 1980-01-19 | Sumitomo Precision Prod Co Ltd | Ozonizer |
| JPS5537483A (en) * | 1978-07-13 | 1980-03-15 | Saint Gobain | Layered window glass and producing same |
| JPS56120507A (en) * | 1980-02-23 | 1981-09-21 | Senichi Masuda | Ozonizer |
| JPS576385A (en) * | 1980-06-12 | 1982-01-13 | Citizen Watch Co Ltd | Movement structure of digital watch |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0237199U (US08063081-20111122-C00044.png) * | 1988-08-31 | 1990-03-12 | ||
| US7160365B2 (en) | 2003-03-10 | 2007-01-09 | Sharp Kabushiki Kaisha | Ion generating apparatus, air conditioning apparatus, and charging apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5944782A (ja) | 1984-03-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0222998B2 (US08063081-20111122-C00044.png) | ||
| JP4349901B2 (ja) | セラミック静電チャックアセンブリ及びその作製方法 | |
| US7922978B2 (en) | Plasma generating electrode and plasma reactor | |
| US5280156A (en) | Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means | |
| US6080970A (en) | Wafer heating apparatus | |
| EP0863545A3 (en) | Monocrystalline ceramic electrostatic chuck | |
| JP2002368069A (ja) | 静電吸着装置 | |
| JPH0760849B2 (ja) | 静電チャック板 | |
| JPS6114103A (ja) | セラミツクを用いたオゾナイザ− | |
| JPH0763032B2 (ja) | 物体の静電的処理装置 | |
| JP4033508B2 (ja) | 静電チャック | |
| JPH09223729A (ja) | 静電チャック | |
| JPH10223742A (ja) | 静電チャック | |
| JP3426845B2 (ja) | 静電チャック | |
| JP2822062B2 (ja) | オゾン発生用放電体 | |
| JP3544018B2 (ja) | オゾン発生器 | |
| JPH08310801A (ja) | オゾン発生用電極装置及びオゾン発生用電極の製造方法 | |
| JPH06291049A (ja) | 薄膜形成装置 | |
| JPH03265505A (ja) | 沿面放電オゾナイザ | |
| JPH01246104A (ja) | オゾン発生用放電体 | |
| JP7150510B2 (ja) | 静電チャック | |
| JPH1022055A (ja) | コロナ放電器 | |
| JPH04198004A (ja) | ヒーター内蔵オゾン発生体 | |
| JPH0730657Y2 (ja) | オゾン発生用放電体 | |
| JPS62201638A (ja) | イオン発生用放電体 |