JPH0219625B2 - - Google Patents

Info

Publication number
JPH0219625B2
JPH0219625B2 JP58193798A JP19379883A JPH0219625B2 JP H0219625 B2 JPH0219625 B2 JP H0219625B2 JP 58193798 A JP58193798 A JP 58193798A JP 19379883 A JP19379883 A JP 19379883A JP H0219625 B2 JPH0219625 B2 JP H0219625B2
Authority
JP
Japan
Prior art keywords
film
integrated circuit
photo
silicon nitride
circuit device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58193798A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6085548A (ja
Inventor
Kunyuki Hamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58193798A priority Critical patent/JPS6085548A/ja
Publication of JPS6085548A publication Critical patent/JPS6085548A/ja
Publication of JPH0219625B2 publication Critical patent/JPH0219625B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W74/01—
    • H10W72/00—
    • H10W72/01515—
    • H10W72/075—
    • H10W72/07551—
    • H10W72/50—
    • H10W72/536—
    • H10W72/5522—
    • H10W72/59—
    • H10W72/952—
    • H10W72/983—

Landscapes

  • Wire Bonding (AREA)
JP58193798A 1983-10-17 1983-10-17 集積回路装置 Granted JPS6085548A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58193798A JPS6085548A (ja) 1983-10-17 1983-10-17 集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58193798A JPS6085548A (ja) 1983-10-17 1983-10-17 集積回路装置

Publications (2)

Publication Number Publication Date
JPS6085548A JPS6085548A (ja) 1985-05-15
JPH0219625B2 true JPH0219625B2 (Direct) 1990-05-02

Family

ID=16313950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58193798A Granted JPS6085548A (ja) 1983-10-17 1983-10-17 集積回路装置

Country Status (1)

Country Link
JP (1) JPS6085548A (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680695B2 (ja) * 1987-07-03 1994-10-12 日本電気株式会社 半導体装置

Also Published As

Publication number Publication date
JPS6085548A (ja) 1985-05-15

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