JPH0217476Y2 - - Google Patents

Info

Publication number
JPH0217476Y2
JPH0217476Y2 JP1981008265U JP826581U JPH0217476Y2 JP H0217476 Y2 JPH0217476 Y2 JP H0217476Y2 JP 1981008265 U JP1981008265 U JP 1981008265U JP 826581 U JP826581 U JP 826581U JP H0217476 Y2 JPH0217476 Y2 JP H0217476Y2
Authority
JP
Japan
Prior art keywords
exposed
mark
stage
plate
dry plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981008265U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57121134U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981008265U priority Critical patent/JPH0217476Y2/ja
Publication of JPS57121134U publication Critical patent/JPS57121134U/ja
Application granted granted Critical
Publication of JPH0217476Y2 publication Critical patent/JPH0217476Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Electron Beam Exposure (AREA)
JP1981008265U 1981-01-23 1981-01-23 Expired JPH0217476Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981008265U JPH0217476Y2 (enEXAMPLES) 1981-01-23 1981-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981008265U JPH0217476Y2 (enEXAMPLES) 1981-01-23 1981-01-23

Publications (2)

Publication Number Publication Date
JPS57121134U JPS57121134U (enEXAMPLES) 1982-07-28
JPH0217476Y2 true JPH0217476Y2 (enEXAMPLES) 1990-05-16

Family

ID=29806421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981008265U Expired JPH0217476Y2 (enEXAMPLES) 1981-01-23 1981-01-23

Country Status (1)

Country Link
JP (1) JPH0217476Y2 (enEXAMPLES)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544355Y2 (enEXAMPLES) * 1975-10-22 1980-10-17
JPS5533644Y2 (enEXAMPLES) * 1976-03-31 1980-08-09

Also Published As

Publication number Publication date
JPS57121134U (enEXAMPLES) 1982-07-28

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