JPH0541547Y2 - - Google Patents
Info
- Publication number
- JPH0541547Y2 JPH0541547Y2 JP5360084U JP5360084U JPH0541547Y2 JP H0541547 Y2 JPH0541547 Y2 JP H0541547Y2 JP 5360084 U JP5360084 U JP 5360084U JP 5360084 U JP5360084 U JP 5360084U JP H0541547 Y2 JPH0541547 Y2 JP H0541547Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- electron beam
- drawing material
- drawn
- guide rollers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 28
- 238000000609 electron-beam lithography Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5360084U JPS60166143U (ja) | 1984-04-12 | 1984-04-12 | 電子ビ−ム描画装置用カセツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5360084U JPS60166143U (ja) | 1984-04-12 | 1984-04-12 | 電子ビ−ム描画装置用カセツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60166143U JPS60166143U (ja) | 1985-11-05 |
| JPH0541547Y2 true JPH0541547Y2 (enEXAMPLES) | 1993-10-20 |
Family
ID=30574618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5360084U Granted JPS60166143U (ja) | 1984-04-12 | 1984-04-12 | 電子ビ−ム描画装置用カセツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60166143U (enEXAMPLES) |
-
1984
- 1984-04-12 JP JP5360084U patent/JPS60166143U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60166143U (ja) | 1985-11-05 |
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