JPH02171756A - Vacuum evaporation source container of photosensitive body for electrophotography - Google Patents
Vacuum evaporation source container of photosensitive body for electrophotographyInfo
- Publication number
- JPH02171756A JPH02171756A JP32839788A JP32839788A JPH02171756A JP H02171756 A JPH02171756 A JP H02171756A JP 32839788 A JP32839788 A JP 32839788A JP 32839788 A JP32839788 A JP 32839788A JP H02171756 A JPH02171756 A JP H02171756A
- Authority
- JP
- Japan
- Prior art keywords
- container
- fractional distillation
- material container
- vapor deposition
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 title claims description 5
- 239000000463 material Substances 0.000 claims abstract description 48
- 238000001704 evaporation Methods 0.000 claims abstract description 18
- 230000008020 evaporation Effects 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 108091008695 photoreceptors Proteins 0.000 claims description 13
- 238000004508 fractional distillation Methods 0.000 abstract description 13
- 238000007740 vapor deposition Methods 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 6
- 239000007788 liquid Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 229910052714 tellurium Inorganic materials 0.000 description 6
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 5
- 229910052711 selenium Inorganic materials 0.000 description 5
- 239000011669 selenium Substances 0.000 description 5
- 229910001215 Te alloy Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 4
- 206010034972 Photosensitivity reaction Diseases 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000036211 photosensitivity Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010549 co-Evaporation Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 206010034960 Photophobia Diseases 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
電子写真用感光体、特に分留性のある多成分感光体の蒸
着に使用される蒸発源容器に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an evaporation source container used for vapor deposition of electrophotographic photoreceptors, particularly multi-component photoreceptors with fractional distillation properties.
真空蒸着法は、ある基板上にある物質の膜を形成させる
方法であり、電子写真用感光体の生産にも利用されてい
る。従来から使用されている方法は、第２図の断面図に
示すように材料容器１に感光材料であるセレンを入れ、
それをさらに外側容器２に入れて真空材料加熱用ヒータ
ー３により加熱蒸発させるものである。しかし、電子写
真用感光体において、単一元素、例えば純セレンを使用
した感光体では、光感度や疲労特性には限度があり多成
分（例えばセレンテルル合金）感光体が必要となってき
た。Vacuum deposition is a method of forming a film of a certain substance on a substrate, and is also used in the production of electrophotographic photoreceptors. The conventionally used method is to put selenium, which is a photosensitive material, into a material container 1 as shown in the cross-sectional view of FIG.
It is further placed in an outer container 2 and heated and evaporated by a vacuum material heating heater 3. However, in electrophotographic photoreceptors, photoreceptors using a single element, such as pure selenium, have limits in photosensitivity and fatigue characteristics, and a multi-component (eg, selenite-tellurium alloy) photoreceptor has become necessary.
多成分材料（例えばセレン−テルル合金など）を真空蒸
着する際に大きな問題となるのは分留という現象である
。例えばセレン−テルル合金の場合、セレンはテルルよ
り蒸気圧が高い。従ってセレンはテルルより優先的に蒸
発する為、得られた膜の組成は膜の深さ方向に対して均
一でなくなり、６重畳％Ｔｅの材料でも蒸発終了時、つ
まり膜の表面は２０重量％Ｔｅにまで達することもある
。この濃度勾配は感光体特性（光感度や疲労特性など）
に大きな影響を与える。しかもこの濃度勾配は常に一定
ではなく微量の不純物や、蒸発温度のばらつきによって
左右されるので特性ばらつきも大きくなるという問題が
あった。A major problem in the vacuum deposition of multicomponent materials (such as selenium-tellurium alloys) is the phenomenon of fractional distillation. For example, in the case of a selenium-tellurium alloy, selenium has a higher vapor pressure than tellurium. Therefore, since selenium evaporates more preferentially than tellurium, the composition of the obtained film is not uniform in the depth direction of the film, and even with a material of 6% Te, at the end of evaporation, that is, the surface of the film is 20% by weight. It may even reach Te. This concentration gradient is determined by photoreceptor characteristics (light sensitivity, fatigue characteristics, etc.)
have a major impact on Moreover, this concentration gradient is not always constant and is influenced by minute amounts of impurities and variations in evaporation temperature, resulting in a problem of large variations in characteristics.
本発明はこのような分留の起きにくい電子写真用感光体
の真空蒸発源容器の提供を目的とする。An object of the present invention is to provide a vacuum evaporation source container for an electrophotographic photoreceptor in which such fractional distillation is less likely to occur.
多成分材料を蒸発させる際に分留を抑える方法として、
共蒸着法、フラッシュ蒸着法などが挙げられるが、共蒸
着は蒸発速度の制御が困難であり、フラッシュ蒸着法は
電子写真用感光体のように６０μｍ以上の厚い膜を形成
するためには非効率的である。本発明は比較的簡単に分
留を抑制することができる。本発明は材料を入れる材料
容器の底部近傍、つまり蒸着材料加熱用ヒーターによる
この容器の加熱面から材料の液面へ向かって熱伝導性の
良い突起物を設けた蒸発源である。As a method to suppress fractional distillation when evaporating multi-component materials,
Examples include co-evaporation and flash evaporation, but co-evaporation makes it difficult to control the evaporation rate, and flash evaporation is inefficient for forming thick films of 60 μm or more, such as on electrophotographic photoreceptors. It is true. The present invention can suppress fractional distillation relatively easily. The present invention is an evaporation source in which a protrusion with good thermal conductivity is provided near the bottom of a material container in which the material is placed, that is, from the heating surface of the container by the heater for heating the evaporation material toward the liquid surface of the material.
〔作用〕
材料容器の底面から材料液面へ向けて突起物を設けた理
由は次のとおりである。材料の蒸発は蒸発液面の温度と
密接な関係があり、セレン−テルルの場合温度が高い程
蒸気圧差が小さくなる。従って液面の温度が高い程分留
が抑えられることになる。これを達成する為に、材料容
器の加熱面から熱伝導性の良い突起物をとりつげればよ
いことになる。[Function] The reason why the protrusion was provided from the bottom of the material container toward the material liquid level is as follows. The evaporation of a material is closely related to the temperature of the evaporated liquid surface, and in the case of selenium-tellurium, the higher the temperature, the smaller the vapor pressure difference. Therefore, the higher the temperature of the liquid surface is, the more the fractional distillation is suppressed. To achieve this, a protrusion with good thermal conductivity may be attached to the heating surface of the material container.
第３図に示すような真空蒸着装置２１を用いた実施例に
ついて述べる。まず第１図の本発明に係る突起１２を備
えた材料容器１１に感光体材料であるセレン−テルル合
金（テルル５％、セレン９５％：重量％）を約５０００
ｇ入れ、第２図の材料容器１のかわりに用い、蒸着され
る基板である円筒状のアルミ管２２を装置２１に取り付
け、図示しない油回転ポンプと油拡散ポンプにより炉内
空気を真空度１Ｏ−６Ｔｏｒｒ程度になるまで排気する
。排気が完了してからヒーター３により蒸着材料の加熱
を開始し、材料容器１１の温度を３４０℃一定に保ち、
蒸着材料を全て蒸発させた。以上の蒸着を従来の材料容
器２と本発明の材料容器１１の２種類でそれぞれ行った
。An example using a vacuum evaporation apparatus 21 as shown in FIG. 3 will be described. First, about 5000% of selenium-tellurium alloy (5% tellurium, 95% selenium: weight %), which is a photoreceptor material, is placed in a material container 11 equipped with projections 12 according to the present invention shown in FIG.
A cylindrical aluminum tube 22, which is used instead of the material container 1 shown in FIG. Exhaust until the temperature is about -6 Torr. After the evacuation is completed, heating of the vapor deposition material is started by the heater 3, and the temperature of the material container 11 is kept constant at 340°C.
All the deposition material was evaporated. The above vapor deposition was carried out in two types, the conventional material container 2 and the material container 11 of the present invention.
その結果蒸発速度は本発明の方が約２０％速く、従来の
材料容器１を使用した蒸着膜はＥＰＭΔによる分析でＡ
ｌ基板近傍のテルル濃度が約１〜３％であるのに対し、
表面近傍で１５〜２５％であった。それに対して本発明
の材料容器１１の場合Ａｌ基板近傍が３〜４％で表面近
傍が１０〜１５％であり本発明の方が従来に比べて分留
が抑えられていることが判った。また、感光体の光感度
は表面の組成により、大きく影響を受けるので、特性の
ばらつきが少なくなるという効果も得られた。As a result, the evaporation rate of the present invention was about 20% faster, and the evaporated film using the conventional material container 1 was found to be A in the EPMΔ analysis.
While the tellurium concentration near the l substrate is about 1 to 3%,
It was 15-25% near the surface. In contrast, in the case of the material container 11 of the present invention, the concentration was 3 to 4% near the Al substrate and 10 to 15% near the surface, indicating that fractional distillation was suppressed in the present invention compared to the conventional method. Furthermore, since the photosensitivity of the photoreceptor is greatly affected by the surface composition, an effect of reducing variations in characteristics was also obtained.
疲労特性（繰り返しの帯電低下）を測定するために、本
発明の材料容器１で作成した感光ドラムを複写機に取り
付け、３００枚の連続コピーを行った。その結果、従来
の蒸発源で作成した方は約２００枚あたりから濃度低下
がみられたが、本発明の方は３００枚まで濃度低下はみ
られなかった。以上の実験を繰り返し１０回行ったが再
現性良く結果を得た。In order to measure fatigue characteristics (repetitive charge reduction), a photosensitive drum prepared using Material Container 1 of the present invention was attached to a copying machine, and 300 sheets were continuously copied. As a result, a decrease in density was observed after about 200 sheets in the case of the conventional evaporation source, but no decrease in density was observed in the case of the present invention up to 300 sheets. The above experiment was repeated 10 times and results were obtained with good reproducibility.
本発明は以下の多くの効果を得ることができる。 The present invention can achieve many of the following effects.
１）分留性のある感光体材料の分留を抑えることができ
るため深さ方向の組成分布のばらつきを抑えることがで
きる。組成分布は光感度特性や疲労特性に大きく影響す
るため特性ばらつきを抑えることができる。1) It is possible to suppress the fractional distillation of a photoreceptor material that has a fractional property, so it is possible to suppress variations in the composition distribution in the depth direction. Since the composition distribution greatly affects photosensitivity characteristics and fatigue characteristics, variation in characteristics can be suppressed.
２）本蒸発源は製作が容易であり、従来使用していたも
のに少し手を加えるだけで効果を得ることができる。2) The present evaporation source is easy to manufacture, and the effect can be obtained by simply making a few changes to the source used in the past.
３）本蒸発源は分留を抑える効果があると同時に蒸発速
度が速いため製造コストが低くなる。3) This evaporation source has the effect of suppressing fractional distillation and at the same time has a high evaporation rate, resulting in low manufacturing costs.
第１図は本発明の一実施例の要部断面図、第２１１
材料容器、１２ 突起。FIG. 1 is a sectional view of a main part of an embodiment of the present invention, and FIG.
Material container, 12 protrusions.
Claims (1)
を介して前記蒸着材料を加熱するために底部近くに置か
れた蒸着材料加熱用ヒーターとを収納する外側容器を備
えた電子写真用感光体の真空蒸発源容器において、材料
容器に、該容器の底部近傍から真空蒸着材料表面に向か
って延びる材料容器と同材料からなる突起が設けられて
いることを特徴とする電子写真用感光体の真空蒸発源容
器。1) An electrophotographic photosensitive device comprising an outer container housing a material container filled with a vacuum evaporation material and a heater for heating the evaporation material placed near the bottom to heat the evaporation material through the material container. A photoreceptor for electrophotography, wherein the material container is provided with a protrusion made of the same material as the material container and extending from near the bottom of the container toward the surface of the vacuum evaporation material. Vacuum source container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32839788A JPH07111585B2 (en) | 1988-12-26 | 1988-12-26 | Vacuum evaporation source container for electrophotographic photoreceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32839788A JPH07111585B2 (en) | 1988-12-26 | 1988-12-26 | Vacuum evaporation source container for electrophotographic photoreceptor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02171756A true JPH02171756A (en) | 1990-07-03 |
| JPH07111585B2 JPH07111585B2 (en) | 1995-11-29 |
Family
ID=18209800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32839788A Expired - Lifetime JPH07111585B2 (en) | 1988-12-26 | 1988-12-26 | Vacuum evaporation source container for electrophotographic photoreceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07111585B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015013987A1 (en) * | 2013-08-02 | 2015-02-05 | 深圳市华星光电技术有限公司 | Crucible with heat conduction device |
-
1988
- 1988-12-26 JP JP32839788A patent/JPH07111585B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015013987A1 (en) * | 2013-08-02 | 2015-02-05 | 深圳市华星光电技术有限公司 | Crucible with heat conduction device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07111585B2 (en) | 1995-11-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3973960A (en) | Electrophotographic element having a selenium layer containing arsenic in varying concentrations across the layer thickness | |
| JPH02171756A (en) | Vacuum evaporation source container of photosensitive body for electrophotography | |
| US2863768A (en) | Xerographic plate | |
| US3984585A (en) | Vacuum evaporation plating method | |
| US3219448A (en) | Photographic medium and methods of preparing same | |
| JPH0260754B2 (en) | ||
| JPS6299459A (en) | Evaporating source for vacuum deposition | |
| JPS6237233Y2 (en) | ||
| JPH0372152B2 (en) | ||
| US4415642A (en) | Electrophotographic member of Se-Te-As with halogen | |
| JPH0243865Y2 (en) | ||
| Berger | Chemical aspects of selenium as a photoreceptor | |
| JPS60166954A (en) | Electrophotographic sensitive body made of selenium | |
| JPS6348558A (en) | Electrophotographic sensitive body | |
| JPS5944055A (en) | Photoreceptor | |
| JPS5943866A (en) | Vapor depositing method | |
| JPS58211158A (en) | Electrophotographic receptor | |
| JPH0234017B2 (en) | ||
| JPS58168052A (en) | Electrophotographic receptor and its manufacture | |
| JPS59137308A (en) | Method for refining selenium material | |
| US4476209A (en) | Selenium-antimony alloy electrophotographic photoreceptors | |
| JPS55143563A (en) | Manufacture of selenium photoreceptor | |
| JPS5872151A (en) | Production for photoreceptor | |
| JPH029107B2 (en) | ||
| HU187919B (en) | Method for making photoelectrically sensitive and conductive layer |