JPH0215443B2 - - Google Patents
Info
- Publication number
- JPH0215443B2 JPH0215443B2 JP25162383A JP25162383A JPH0215443B2 JP H0215443 B2 JPH0215443 B2 JP H0215443B2 JP 25162383 A JP25162383 A JP 25162383A JP 25162383 A JP25162383 A JP 25162383A JP H0215443 B2 JPH0215443 B2 JP H0215443B2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- load
- station
- room
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25162383A JPS60140035A (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷搬送設備 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25162383A JPS60140035A (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷搬送設備 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60140035A JPS60140035A (ja) | 1985-07-24 |
| JPH0215443B2 true JPH0215443B2 (US06174465-20010116-C00003.png) | 1990-04-12 |
Family
ID=17225578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25162383A Granted JPS60140035A (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷搬送設備 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60140035A (US06174465-20010116-C00003.png) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244806U (US06174465-20010116-C00003.png) * | 1985-09-09 | 1987-03-18 | ||
| JPS62122245U (US06174465-20010116-C00003.png) * | 1986-01-24 | 1987-08-03 | ||
| JPS62144208U (US06174465-20010116-C00003.png) * | 1986-02-28 | 1987-09-11 | ||
| JPH0338163Y2 (US06174465-20010116-C00003.png) * | 1986-06-10 | 1991-08-13 | ||
| JPH0318405Y2 (US06174465-20010116-C00003.png) * | 1986-09-02 | 1991-04-18 | ||
| JPH0318406Y2 (US06174465-20010116-C00003.png) * | 1986-09-17 | 1991-04-18 | ||
| JPS6384012U (US06174465-20010116-C00003.png) * | 1986-11-20 | 1988-06-02 |
-
1983
- 1983-12-27 JP JP25162383A patent/JPS60140035A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60140035A (ja) | 1985-07-24 |
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| JPH082614A (ja) | 荷保管設備 |
