JPH021531B2 - - Google Patents

Info

Publication number
JPH021531B2
JPH021531B2 JP11104382A JP11104382A JPH021531B2 JP H021531 B2 JPH021531 B2 JP H021531B2 JP 11104382 A JP11104382 A JP 11104382A JP 11104382 A JP11104382 A JP 11104382A JP H021531 B2 JPH021531 B2 JP H021531B2
Authority
JP
Japan
Prior art keywords
electron beam
annealing
electron
laser
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11104382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS594435A (ja
Inventor
Seiichiro Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11104382A priority Critical patent/JPS594435A/ja
Publication of JPS594435A publication Critical patent/JPS594435A/ja
Publication of JPH021531B2 publication Critical patent/JPH021531B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11104382A 1982-06-28 1982-06-28 電子ビ−ムアニ−ル方法 Granted JPS594435A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11104382A JPS594435A (ja) 1982-06-28 1982-06-28 電子ビ−ムアニ−ル方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11104382A JPS594435A (ja) 1982-06-28 1982-06-28 電子ビ−ムアニ−ル方法

Publications (2)

Publication Number Publication Date
JPS594435A JPS594435A (ja) 1984-01-11
JPH021531B2 true JPH021531B2 (cs) 1990-01-11

Family

ID=14550958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11104382A Granted JPS594435A (ja) 1982-06-28 1982-06-28 電子ビ−ムアニ−ル方法

Country Status (1)

Country Link
JP (1) JPS594435A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61266387A (ja) * 1985-05-20 1986-11-26 Fujitsu Ltd 半導体薄膜のレ−ザ再結晶化法

Also Published As

Publication number Publication date
JPS594435A (ja) 1984-01-11

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