JPH02146832U - - Google Patents
Info
- Publication number
- JPH02146832U JPH02146832U JP4877790U JP4877790U JPH02146832U JP H02146832 U JPH02146832 U JP H02146832U JP 4877790 U JP4877790 U JP 4877790U JP 4877790 U JP4877790 U JP 4877790U JP H02146832 U JPH02146832 U JP H02146832U
- Authority
- JP
- Japan
- Prior art keywords
- mounting points
- unit
- fixed point
- substrate
- actual position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims 2
- 238000003909 pattern recognition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4877790U JPH02146832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-10 | 1990-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4877790U JPH02146832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-10 | 1990-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146832U true JPH02146832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-13 |
Family
ID=31565892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4877790U Pending JPH02146832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-10 | 1990-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5563836A (en) * | 1978-11-06 | 1980-05-14 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Defect detection device for insulating film |
| JPS56146242A (en) * | 1980-04-16 | 1981-11-13 | Hitachi Ltd | Positioning method of bonding position at fixed position on substrate |
| JPS5726448A (en) * | 1980-07-23 | 1982-02-12 | Hitachi Ltd | Pellet attaching device with recognizing mechanism |
| JPS5753950A (ja) * | 1980-09-17 | 1982-03-31 | Fujitsu Ltd | Peretsutobondeingusochi |
| JPS5763836A (en) * | 1980-10-04 | 1982-04-17 | Shinkawa Ltd | Die bonding apparatus |
-
1990
- 1990-05-10 JP JP4877790U patent/JPH02146832U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5563836A (en) * | 1978-11-06 | 1980-05-14 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Defect detection device for insulating film |
| JPS56146242A (en) * | 1980-04-16 | 1981-11-13 | Hitachi Ltd | Positioning method of bonding position at fixed position on substrate |
| JPS5726448A (en) * | 1980-07-23 | 1982-02-12 | Hitachi Ltd | Pellet attaching device with recognizing mechanism |
| JPS5753950A (ja) * | 1980-09-17 | 1982-03-31 | Fujitsu Ltd | Peretsutobondeingusochi |
| JPS5763836A (en) * | 1980-10-04 | 1982-04-17 | Shinkawa Ltd | Die bonding apparatus |