JPH02146444U - - Google Patents

Info

Publication number
JPH02146444U
JPH02146444U JP5655889U JP5655889U JPH02146444U JP H02146444 U JPH02146444 U JP H02146444U JP 5655889 U JP5655889 U JP 5655889U JP 5655889 U JP5655889 U JP 5655889U JP H02146444 U JPH02146444 U JP H02146444U
Authority
JP
Japan
Prior art keywords
wafer
supply section
cassette
intermittently
wafer cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5655889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0751797Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989056558U priority Critical patent/JPH0751797Y2/ja
Publication of JPH02146444U publication Critical patent/JPH02146444U/ja
Application granted granted Critical
Publication of JPH0751797Y2 publication Critical patent/JPH0751797Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP1989056558U 1989-05-17 1989-05-17 縦型プラズマ処理機のウエハー搬送装置 Expired - Lifetime JPH0751797Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989056558U JPH0751797Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のウエハー搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989056558U JPH0751797Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のウエハー搬送装置

Publications (2)

Publication Number Publication Date
JPH02146444U true JPH02146444U (uk) 1990-12-12
JPH0751797Y2 JPH0751797Y2 (ja) 1995-11-22

Family

ID=31580493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989056558U Expired - Lifetime JPH0751797Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のウエハー搬送装置

Country Status (1)

Country Link
JP (1) JPH0751797Y2 (uk)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121140U (uk) * 1981-01-21 1982-07-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121140U (uk) * 1981-01-21 1982-07-28

Also Published As

Publication number Publication date
JPH0751797Y2 (ja) 1995-11-22

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