JPH02140853U - - Google Patents
Info
- Publication number
- JPH02140853U JPH02140853U JP4901589U JP4901589U JPH02140853U JP H02140853 U JPH02140853 U JP H02140853U JP 4901589 U JP4901589 U JP 4901589U JP 4901589 U JP4901589 U JP 4901589U JP H02140853 U JPH02140853 U JP H02140853U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film transistors
- insulating layer
- interconnection structure
- contact hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4901589U JPH02140853U (US20030199744A1-20031023-C00003.png) | 1989-04-26 | 1989-04-26 | |
| CA000613680A CA1313563C (en) | 1988-10-26 | 1989-09-27 | Thin film transistor panel |
| US07/415,889 US5084905A (en) | 1988-10-26 | 1989-10-02 | Thin film transistor panel and manufacturing method thereof |
| EP89119842A EP0366116B1 (en) | 1988-10-26 | 1989-10-25 | Thin film transistor panel and manufacturing method thereof |
| DE68923054T DE68923054T2 (de) | 1988-10-26 | 1989-10-25 | Dünnschicht-Transistortafel und Herstellungsverfahren. |
| KR1019890015469A KR940004764B1 (ko) | 1988-10-26 | 1989-10-26 | 박막트랜지스타 판넬 및 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4901589U JPH02140853U (US20030199744A1-20031023-C00003.png) | 1989-04-26 | 1989-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140853U true JPH02140853U (US20030199744A1-20031023-C00003.png) | 1990-11-26 |
Family
ID=31566340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4901589U Pending JPH02140853U (US20030199744A1-20031023-C00003.png) | 1988-10-26 | 1989-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140853U (US20030199744A1-20031023-C00003.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5868965A (ja) * | 1981-10-21 | 1983-04-25 | Hitachi Ltd | 受光素子の製造方法 |
| JPS59205738A (ja) * | 1983-05-10 | 1984-11-21 | Seiko Epson Corp | アクテイブマトリツクス基板 |
-
1989
- 1989-04-26 JP JP4901589U patent/JPH02140853U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5868965A (ja) * | 1981-10-21 | 1983-04-25 | Hitachi Ltd | 受光素子の製造方法 |
| JPS59205738A (ja) * | 1983-05-10 | 1984-11-21 | Seiko Epson Corp | アクテイブマトリツクス基板 |
