JPH02138459A - 複合硬質材料及びその製造方法 - Google Patents
複合硬質材料及びその製造方法Info
- Publication number
- JPH02138459A JPH02138459A JP28973588A JP28973588A JPH02138459A JP H02138459 A JPH02138459 A JP H02138459A JP 28973588 A JP28973588 A JP 28973588A JP 28973588 A JP28973588 A JP 28973588A JP H02138459 A JPH02138459 A JP H02138459A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- composite
- coating film
- hard material
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 64
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 150000002500 ions Chemical class 0.000 claims abstract description 26
- 239000011248 coating agent Substances 0.000 claims abstract description 22
- 238000000576 coating method Methods 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 12
- -1 nitrogen ions Chemical class 0.000 claims abstract description 12
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 8
- 239000002131 composite material Substances 0.000 claims description 62
- 239000000203 mixture Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 abstract description 9
- 238000007254 oxidation reaction Methods 0.000 abstract description 9
- 238000005520 cutting process Methods 0.000 abstract description 8
- 238000005336 cracking Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- 150000004767 nitrides Chemical class 0.000 description 8
- 229910000997 High-speed steel Inorganic materials 0.000 description 7
- 230000001133 acceleration Effects 0.000 description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910004349 Ti-Al Inorganic materials 0.000 description 1
- 229910004692 Ti—Al Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011206 ternary composite Substances 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000004584 weight gain Effects 0.000 description 1
- 235000019786 weight gain Nutrition 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28973588A JPH02138459A (ja) | 1988-11-16 | 1988-11-16 | 複合硬質材料及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28973588A JPH02138459A (ja) | 1988-11-16 | 1988-11-16 | 複合硬質材料及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02138459A true JPH02138459A (ja) | 1990-05-28 |
| JPH0588310B2 JPH0588310B2 (enrdf_load_stackoverflow) | 1993-12-21 |
Family
ID=17747075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28973588A Granted JPH02138459A (ja) | 1988-11-16 | 1988-11-16 | 複合硬質材料及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138459A (enrdf_load_stackoverflow) |
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02170965A (ja) * | 1988-12-22 | 1990-07-02 | Sumitomo Metal Mining Co Ltd | 耐酸化耐摩耗性被覆鋼材 |
| JPH04103755A (ja) * | 1990-08-23 | 1992-04-06 | Sumitomo Metal Mining Co Ltd | 表面被覆鋼製品及びその製造方法 |
| JPH0592304A (ja) * | 1991-05-21 | 1993-04-16 | Nachi Fujikoshi Corp | 複層コーテイング工具 |
| JPH05285215A (ja) * | 1992-04-09 | 1993-11-02 | Masaru Yamaoka | Ｔｉ−Ａｌ−Ｎ組成物の皮膜を備えた器具 |
| DE4408250A1 (de) * | 1993-07-12 | 1995-01-19 | Oriental Engineering Co | Verfahren zum Beschichten der Oberfläche eines Substrats und Beschichtungsmaterial |
| US6071374A (en) * | 1996-06-26 | 2000-06-06 | Lg Electronics Inc. | Apparatus for etching glass substrate |
| US6197209B1 (en) | 1995-10-27 | 2001-03-06 | Lg. Philips Lcd Co., Ltd. | Method of fabricating a substrate |
| US6228211B1 (en) | 1998-09-08 | 2001-05-08 | Lg. Philips Lcd Co., Ltd. | Apparatus for etching a glass substrate |
| US6551443B2 (en) | 2000-12-30 | 2003-04-22 | Lg.Philips Lcd Co., Ltd. | Apparatus for etching glass substrate in fabrication of LCD |
| US6558776B1 (en) | 1998-10-22 | 2003-05-06 | Lg.Philips Lcd Co., Ltd. | Glass substrate for liquid crystal display device |
| US6824618B2 (en) | 2001-12-19 | 2004-11-30 | Lg.Philips Lcd., Ltd. | Substrate receiving apparatus and method thereof |
| US6836311B2 (en) | 2002-05-23 | 2004-12-28 | Lg. Philips Lcd Co., Ltd. | Seal pattern for liquid crystal display device including first, second and third dummy seal patterns in non-active area |
| US6930748B2 (en) | 2000-12-29 | 2005-08-16 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
| US6955840B2 (en) | 1997-10-20 | 2005-10-18 | Lg. Philips Lcd Co., Ltd. | Liquid crystal display device having thin glass substrate on which protective layer formed and method of making the same |
| US6958801B2 (en) | 2001-11-07 | 2005-10-25 | Lg.Philips Lcd Co., Ltd. | Seal pattern for ultra-thin liquid crystal display device |
| US7016008B2 (en) | 2001-12-18 | 2006-03-21 | Lg.Philips Lcd Co., Ltd. | Method of fabricating liquid crystal display device having sealant patterns, dummy patterns, and substrate protective patterns |
| US7014732B2 (en) | 2001-12-29 | 2006-03-21 | Lg.Philips Lcd Co., Ltd. | Etching apparatus |
| US7336334B2 (en) | 2001-12-06 | 2008-02-26 | Lg.Philips Lcd Co., Ltd. | Fabrication method of liquid crystal display device |
| US7361610B2 (en) | 2000-12-27 | 2008-04-22 | Lg.Philips Lcd Co., Ltd. | Method of etching a glass substrate |
| US7388642B2 (en) | 2000-11-30 | 2008-06-17 | Lg Display Co., Ltd. | Seal pattern for liquid crystal display device and forming method thereof |
| US7393431B2 (en) | 2001-09-25 | 2008-07-01 | Lg Display Co., Ltd. | Bubble plate for etching and etching apparatus using the same |
| US7736461B2 (en) | 2002-10-07 | 2010-06-15 | Lg Display Co., Ltd. | Cassette for preventing breakage of glass substrate |
| US8043466B1 (en) | 1997-03-21 | 2011-10-25 | Lg Display Co., Ltd | Etching apparatus |
| US8512580B2 (en) | 2001-09-21 | 2013-08-20 | Lg Display Co., Ltd. | Method of fabricating thin liquid crystal display device |
-
1988
- 1988-11-16 JP JP28973588A patent/JPH02138459A/ja active Granted
Cited By (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02170965A (ja) * | 1988-12-22 | 1990-07-02 | Sumitomo Metal Mining Co Ltd | 耐酸化耐摩耗性被覆鋼材 |
| JPH04103755A (ja) * | 1990-08-23 | 1992-04-06 | Sumitomo Metal Mining Co Ltd | 表面被覆鋼製品及びその製造方法 |
| JPH0592304A (ja) * | 1991-05-21 | 1993-04-16 | Nachi Fujikoshi Corp | 複層コーテイング工具 |
| JPH05285215A (ja) * | 1992-04-09 | 1993-11-02 | Masaru Yamaoka | Ｔｉ−Ａｌ−Ｎ組成物の皮膜を備えた器具 |
| DE4408250C2 (de) * | 1993-07-12 | 2001-06-13 | Oriental Engineering Co | Oberflächenschichtsystem für Substrate |
| DE4408250A1 (de) * | 1993-07-12 | 1995-01-19 | Oriental Engineering Co | Verfahren zum Beschichten der Oberfläche eines Substrats und Beschichtungsmaterial |
| US6197209B1 (en) | 1995-10-27 | 2001-03-06 | Lg. Philips Lcd Co., Ltd. | Method of fabricating a substrate |
| US6071374A (en) * | 1996-06-26 | 2000-06-06 | Lg Electronics Inc. | Apparatus for etching glass substrate |
| US8043466B1 (en) | 1997-03-21 | 2011-10-25 | Lg Display Co., Ltd | Etching apparatus |
| US6955840B2 (en) | 1997-10-20 | 2005-10-18 | Lg. Philips Lcd Co., Ltd. | Liquid crystal display device having thin glass substrate on which protective layer formed and method of making the same |
| US6228211B1 (en) | 1998-09-08 | 2001-05-08 | Lg. Philips Lcd Co., Ltd. | Apparatus for etching a glass substrate |
| US6558776B1 (en) | 1998-10-22 | 2003-05-06 | Lg.Philips Lcd Co., Ltd. | Glass substrate for liquid crystal display device |
| US7388642B2 (en) | 2000-11-30 | 2008-06-17 | Lg Display Co., Ltd. | Seal pattern for liquid crystal display device and forming method thereof |
| US7361610B2 (en) | 2000-12-27 | 2008-04-22 | Lg.Philips Lcd Co., Ltd. | Method of etching a glass substrate |
| US6930748B2 (en) | 2000-12-29 | 2005-08-16 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
| US6551443B2 (en) | 2000-12-30 | 2003-04-22 | Lg.Philips Lcd Co., Ltd. | Apparatus for etching glass substrate in fabrication of LCD |
| US8512580B2 (en) | 2001-09-21 | 2013-08-20 | Lg Display Co., Ltd. | Method of fabricating thin liquid crystal display device |
| US7393431B2 (en) | 2001-09-25 | 2008-07-01 | Lg Display Co., Ltd. | Bubble plate for etching and etching apparatus using the same |
| US6958801B2 (en) | 2001-11-07 | 2005-10-25 | Lg.Philips Lcd Co., Ltd. | Seal pattern for ultra-thin liquid crystal display device |
| US7068346B2 (en) | 2001-11-07 | 2006-06-27 | Lg.Philips Lcd Co., Ltd. | Seal pattern for ultra-thin liquid crystal display device |
| US7336334B2 (en) | 2001-12-06 | 2008-02-26 | Lg.Philips Lcd Co., Ltd. | Fabrication method of liquid crystal display device |
| US7016008B2 (en) | 2001-12-18 | 2006-03-21 | Lg.Philips Lcd Co., Ltd. | Method of fabricating liquid crystal display device having sealant patterns, dummy patterns, and substrate protective patterns |
| US6824618B2 (en) | 2001-12-19 | 2004-11-30 | Lg.Philips Lcd., Ltd. | Substrate receiving apparatus and method thereof |
| US7790052B2 (en) | 2001-12-19 | 2010-09-07 | Lg Display Co., Ltd. | Substrate receiving method |
| US7014732B2 (en) | 2001-12-29 | 2006-03-21 | Lg.Philips Lcd Co., Ltd. | Etching apparatus |
| US7494595B2 (en) | 2001-12-29 | 2009-02-24 | Lg Display Co., Ltd. | Etching apparatus |
| US6836311B2 (en) | 2002-05-23 | 2004-12-28 | Lg. Philips Lcd Co., Ltd. | Seal pattern for liquid crystal display device including first, second and third dummy seal patterns in non-active area |
| US6919949B2 (en) | 2002-05-23 | 2005-07-19 | Lg.Philips Lcd Co., Ltd. | Seal pattern for liquid crystal display device including inner seal with first and second openings |
| US7736461B2 (en) | 2002-10-07 | 2010-06-15 | Lg Display Co., Ltd. | Cassette for preventing breakage of glass substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0588310B2 (enrdf_load_stackoverflow) | 1993-12-21 |
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