JPH0587592B2 - - Google Patents
Info
- Publication number
- JPH0587592B2 JPH0587592B2 JP16616088A JP16616088A JPH0587592B2 JP H0587592 B2 JPH0587592 B2 JP H0587592B2 JP 16616088 A JP16616088 A JP 16616088A JP 16616088 A JP16616088 A JP 16616088A JP H0587592 B2 JPH0587592 B2 JP H0587592B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film layer
- tial
- ions
- composite material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 37
- 229910010038 TiAl Inorganic materials 0.000 claims description 32
- 239000002131 composite material Substances 0.000 claims description 32
- 150000002500 ions Chemical class 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 30
- 229910000765 intermetallic Inorganic materials 0.000 claims description 19
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 9
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052684 Cerium Inorganic materials 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
- 238000002513 implantation Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 38
- 230000003647 oxidation Effects 0.000 description 19
- 238000007254 oxidation reaction Methods 0.000 description 19
- 229910045601 alloy Inorganic materials 0.000 description 11
- 239000000956 alloy Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 238000005468 ion implantation Methods 0.000 description 8
- 230000001590 oxidative effect Effects 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910010039 TiAl3 Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16616088A JPH0215164A (ja) | 1988-07-04 | 1988-07-04 | 複合材料 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16616088A JPH0215164A (ja) | 1988-07-04 | 1988-07-04 | 複合材料 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215164A JPH0215164A (ja) | 1990-01-18 |
| JPH0587592B2 true JPH0587592B2 (enrdf_load_stackoverflow) | 1993-12-17 |
Family
ID=15826183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16616088A Granted JPH0215164A (ja) | 1988-07-04 | 1988-07-04 | 複合材料 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215164A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2592961B2 (ja) * | 1989-09-14 | 1997-03-19 | 株式会社神戸製鋼所 | 耐摩耗性Ｔｉ又はＴｉ基合金部材 |
| JPH03193859A (ja) * | 1989-12-22 | 1991-08-23 | Nippon Steel Corp | 耐酸化性を改善したＴｉＡｌ系金属間化合物構造材およびその製造方法 |
| US7455890B2 (en) * | 2003-08-05 | 2008-11-25 | General Electric Company | Ion implantation of turbine engine rotor component |
| CN108504977B (zh) * | 2018-04-28 | 2020-10-02 | 江西科技师范大学 | 一种钛合金抗高温氧化涂层的制备方法 |
-
1988
- 1988-07-04 JP JP16616088A patent/JPH0215164A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0215164A (ja) | 1990-01-18 |
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