JPH021366B2 - - Google Patents

Info

Publication number
JPH021366B2
JPH021366B2 JP56182653A JP18265381A JPH021366B2 JP H021366 B2 JPH021366 B2 JP H021366B2 JP 56182653 A JP56182653 A JP 56182653A JP 18265381 A JP18265381 A JP 18265381A JP H021366 B2 JPH021366 B2 JP H021366B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
thin film
film
substrate
silicon thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56182653A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5884465A (ja
Inventor
Toshuki Komatsu
Yutaka Hirai
Katsumi Nakagawa
Yoshuki Osada
Tomoji Komata
Takashi Nakagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56182653A priority Critical patent/JPS5884465A/ja
Priority to DE19823241959 priority patent/DE3241959A1/de
Publication of JPS5884465A publication Critical patent/JPS5884465A/ja
Priority to US07/188,677 priority patent/US4905072A/en
Publication of JPH021366B2 publication Critical patent/JPH021366B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Liquid Crystal (AREA)
  • Weting (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP56182653A 1981-11-13 1981-11-13 半導体素子 Granted JPS5884465A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56182653A JPS5884465A (ja) 1981-11-13 1981-11-13 半導体素子
DE19823241959 DE3241959A1 (de) 1981-11-13 1982-11-12 Halbleiterbauelement
US07/188,677 US4905072A (en) 1981-11-13 1988-04-29 Semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56182653A JPS5884465A (ja) 1981-11-13 1981-11-13 半導体素子

Publications (2)

Publication Number Publication Date
JPS5884465A JPS5884465A (ja) 1983-05-20
JPH021366B2 true JPH021366B2 (enrdf_load_stackoverflow) 1990-01-11

Family

ID=16122071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56182653A Granted JPS5884465A (ja) 1981-11-13 1981-11-13 半導体素子

Country Status (1)

Country Link
JP (1) JPS5884465A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066825A (ja) * 1983-09-22 1985-04-17 Toshiba Corp 半導体装置の製造方法
US7154147B1 (en) 1990-11-26 2006-12-26 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and driving method for the same
US8106867B2 (en) 1990-11-26 2012-01-31 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and driving method for the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511329A (en) * 1978-07-08 1980-01-26 Shunpei Yamazaki Semiconductor device
JPS5550663A (en) * 1978-10-07 1980-04-12 Shunpei Yamazaki Semiconductor device and method of fabricating the same
JPS55151329A (en) * 1979-05-14 1980-11-25 Shunpei Yamazaki Fabricating method of semiconductor device
JPS55154726A (en) * 1979-05-22 1980-12-02 Shunpei Yamazaki Manufacture of semiconductor device
JPS56138929A (en) * 1980-03-31 1981-10-29 Canon Inc Component solution for etching
JPH021365A (ja) * 1988-06-09 1990-01-05 Honshu Paper Co Ltd 感熱記録体
JPH021367A (ja) * 1988-06-09 1990-01-05 Fuji Photo Film Co Ltd 感熱記録材料

Also Published As

Publication number Publication date
JPS5884465A (ja) 1983-05-20

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