JPH02127031U - - Google Patents

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Publication number
JPH02127031U
JPH02127031U JP3708789U JP3708789U JPH02127031U JP H02127031 U JPH02127031 U JP H02127031U JP 3708789 U JP3708789 U JP 3708789U JP 3708789 U JP3708789 U JP 3708789U JP H02127031 U JPH02127031 U JP H02127031U
Authority
JP
Japan
Prior art keywords
plasma
generation chamber
plasma generation
partition wall
sample processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3708789U
Other languages
English (en)
Other versions
JPH0744017Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989037087U priority Critical patent/JPH0744017Y2/ja
Publication of JPH02127031U publication Critical patent/JPH02127031U/ja
Application granted granted Critical
Publication of JPH0744017Y2 publication Critical patent/JPH0744017Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案に係るプラズマアツシング装置
の模式的正面断面図、第２図は従来のバレル型の
プラズマアツシング装置の模式的正面断面図、第
３図は従来のダウンフロー型のプラズマアツシン
グ装置の模式的正面断面図、第４図は従来の誘電
体被覆線路を利用する方式のプラズマアツシング
装置の模式的正面断面図である。 １３…仕切壁、４…プラズマ生成室、５…試料
処理室、Ｓ…試料。

Claims (1)

  1. 【実用新案登録請求の範囲】 マイクロ波の作用によりプラズマを生成するプ
    ラズマ生成室と、試料を処理する試料処理室との
    間に、該試料処理室へのプラズマ導入孔を有する
    仕切壁を設けたプラズマアツシング装置において
    、 前記仕切壁及び前記プラズマ生成室の周壁の一
    部を、該プラズマ生成室の内側の耐熱性誘電体層
    と、その外側のマイクロ波遮蔽材料層とを有する
    ２層構造としてあることを特徴とするプラズマア
    ツシング装置。
JP1989037087U 1989-03-28 1989-03-28 プラズマアッシング装置 Expired - Lifetime JPH0744017Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989037087U JPH0744017Y2 (ja) 1989-03-28 1989-03-28 プラズマアッシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989037087U JPH0744017Y2 (ja) 1989-03-28 1989-03-28 プラズマアッシング装置

Publications (2)

Publication Number Publication Date
JPH02127031U true JPH02127031U (ja) 1990-10-19
JPH0744017Y2 JPH0744017Y2 (ja) 1995-10-09

Family

ID=31543883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989037087U Expired - Lifetime JPH0744017Y2 (ja) 1989-03-28 1989-03-28 プラズマアッシング装置

Country Status (1)

Country Link
JP (1) JPH0744017Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62213126A (ja) * 1986-03-13 1987-09-19 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS64326U (ja) * 1987-06-19 1989-01-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62213126A (ja) * 1986-03-13 1987-09-19 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS64326U (ja) * 1987-06-19 1989-01-05

Also Published As

Publication number Publication date
JPH0744017Y2 (ja) 1995-10-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term