JPH01119200U - - Google Patents

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Publication number
JPH01119200U
JPH01119200U JP1487788U JP1487788U JPH01119200U JP H01119200 U JPH01119200 U JP H01119200U JP 1487788 U JP1487788 U JP 1487788U JP 1487788 U JP1487788 U JP 1487788U JP H01119200 U JPH01119200 U JP H01119200U
Authority
JP
Japan
Prior art keywords
reaction vessel
plasma generation
dielectric
covered line
dielectric covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1487788U
Other languages
English (en)
Other versions
JPH0638400Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1487788U priority Critical patent/JPH0638400Y2/ja
Publication of JPH01119200U publication Critical patent/JPH01119200U/ja
Application granted granted Critical
Publication of JPH0638400Y2 publication Critical patent/JPH0638400Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
図面は本考案の一実施例を断面して示す正面図
である。 １は誘電体被覆線路、２は導体、３は誘電体、
４は反応容器、５は環状空間、６は被処理物。

Claims (1)

    【実用新案登録請求の範囲】
  1. マイクロ波発振器からのマイクロ波を伝送する
    導波管に連通された断面円形の導体を誘電体で被
    覆してなる誘電体被覆線路と、該誘電体被覆線路
    の外周部に環状空間を形成すべく配置されたプラ
    ズマ発生用反応容器と、該反応容器に連通すべく
    設けられたガス導入装置及び排気装置を具備して
    成ることを特徴とするマイクロ波プラズマ発生装
    置。
JP1487788U 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置 Expired - Lifetime JPH0638400Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1487788U JPH0638400Y2 (ja) 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1487788U JPH0638400Y2 (ja) 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPH01119200U true JPH01119200U (ja) 1989-08-11
JPH0638400Y2 JPH0638400Y2 (ja) 1994-10-05

Family

ID=31226458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1487788U Expired - Lifetime JPH0638400Y2 (ja) 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0638400Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09223596A (ja) * 1996-02-15 1997-08-26 Bridgestone Corp マイクロ波プラズマ発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09223596A (ja) * 1996-02-15 1997-08-26 Bridgestone Corp マイクロ波プラズマ発生装置

Also Published As

Publication number Publication date
JPH0638400Y2 (ja) 1994-10-05

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