JPH0210118Y2 - - Google Patents
Info
- Publication number
- JPH0210118Y2 JPH0210118Y2 JP14754384U JP14754384U JPH0210118Y2 JP H0210118 Y2 JPH0210118 Y2 JP H0210118Y2 JP 14754384 U JP14754384 U JP 14754384U JP 14754384 U JP14754384 U JP 14754384U JP H0210118 Y2 JPH0210118 Y2 JP H0210118Y2
- Authority
- JP
- Japan
- Prior art keywords
- cover
- vapor deposition
- boat
- main body
- csi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007740 vapor deposition Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 3
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 description 21
- 239000000758 substrate Substances 0.000 description 18
- 230000008020 evaporation Effects 0.000 description 14
- 238000001704 evaporation Methods 0.000 description 14
- 238000000151 deposition Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 9
- 239000000843 powder Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14754384U JPH0210118Y2 (enrdf_load_html_response) | 1984-09-29 | 1984-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14754384U JPH0210118Y2 (enrdf_load_html_response) | 1984-09-29 | 1984-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164160U JPS6164160U (enrdf_load_html_response) | 1986-05-01 |
| JPH0210118Y2 true JPH0210118Y2 (enrdf_load_html_response) | 1990-03-13 |
Family
ID=30705768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14754384U Expired JPH0210118Y2 (enrdf_load_html_response) | 1984-09-29 | 1984-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210118Y2 (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005029895A (ja) * | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | 蒸着装置 |
| JP5709588B2 (ja) * | 2011-03-03 | 2015-04-30 | ホーヤ レンズ マニュファクチャリング フィリピン インク | 蒸着装置 |
-
1984
- 1984-09-29 JP JP14754384U patent/JPH0210118Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6164160U (enrdf_load_html_response) | 1986-05-01 |
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