JPH0193128A - 半導体製造装置 - Google Patents
半導体製造装置Info
- Publication number
- JPH0193128A JPH0193128A JP62250866A JP25086687A JPH0193128A JP H0193128 A JPH0193128 A JP H0193128A JP 62250866 A JP62250866 A JP 62250866A JP 25086687 A JP25086687 A JP 25086687A JP H0193128 A JPH0193128 A JP H0193128A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- liquid
- temperature
- storage tank
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 238000005530 etching Methods 0.000 claims abstract description 71
- 239000007788 liquid Substances 0.000 claims description 75
- 238000011084 recovery Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 abstract description 19
- 238000000034 method Methods 0.000 abstract description 5
- 239000000498 cooling water Substances 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000012774 insulation material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Devices For Dispensing Beverages (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62250866A JPH0193128A (ja) | 1987-10-05 | 1987-10-05 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62250866A JPH0193128A (ja) | 1987-10-05 | 1987-10-05 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0193128A true JPH0193128A (ja) | 1989-04-12 |
| JPH0543290B2 JPH0543290B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-01 |
Family
ID=17214174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62250866A Granted JPH0193128A (ja) | 1987-10-05 | 1987-10-05 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0193128A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-10-05 JP JP62250866A patent/JPH0193128A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543290B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-01 |
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